
<PAGE>
 
                                                                    Exhibit 23.1


                        CONSENT OF INDEPENDENT AUDITORS


We consent to the incorporation by reference in the Registration Statement (Form
S-8) pertaining to the Lam Research Corporation 1997 Stock Incentive Plan of
our report dated July 29, 1996 with respect to the consolidated financial
statements of Lam Research Corporation incorporated by reference in its Annual
Report (Form 10-K) for the year ended June 30, 1996 and the related financial
statement schedule included therein, filed with the Securities and Exchange
Commission, incorporated by reference in the Joint Proxy Statement/Prospectus
included as part of the Company's Registration Statement (Form S-4) incorporated
by reference herein.

                                              /s/ ERNST & YOUNG LLP

San Jose, California
August 5, 1997

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