0000923960-03-000002 4 2 20031209 20031210 ELKUS RICHARD J JR 0000923960 4 34 000-12933 031048099 KLA TENCOR 160 RIO RABLES SAN JOSE CA 95134 4088753000 LAM RESEARCH CORP 0000707549 3559 942634797 DE 0630 4650 CUSHING BLVD FREMONT CA 94538 5106590200 4650 CUSHING PARKWAY FREMONT CA 94538 4 1 primary_doc.xml PRIMARY DOCUMENT EX-24 3 ex24elkus.htm POWER OF ATTORNEY