EX-21 2 d741932dex21.htm EX-21

Exhibit 21

SUBSIDIARIES OF THE REGISTRANT

SUBSIDIARY |  | STATE OR OTHER JURISDICTION OF OPERATION
Lam Research AG |  | Austria
Lam Research Management GmbH |  | Austria
Novellus Systems Export, Inc. |  | Barbados
IPEC FSC Ltd |  | Barbados
IPEC International Sales FSC Ltd |  | Barbados
Novellus Systems, Inc. |  | California, United States
Novellus Systems International, LLC |  | California, United States
Angstron Systems, Inc. |  | California, United States
Gamma Precision Technology |  | California, United States
Lam Research International Holdings Ltd. |  | Cayman Islands
Lam Research (Shanghai) Co., Ltd. |  | China
Lam Research Service Co., Ltd. |  | China
Novellus Systems Semiconductor Equipment Shanghai Co. Ltd. |  | China
Novellus Systems International Trading (Shanghai) Co. Ltd. |  | China
Lam Research International Holding Company |  | Delaware, United States
Metryx, Inc. |  | Delaware, United States
Novellus International Holdco, LLC. |  | Delaware, United States
SpeedFam-IPEC International Services, LLC |  | Delaware, United States
Tmation Inc. |  | Delaware, United States
Novellus Development Company, LLC |  | Delaware, United States
Silfex, Inc. |  | Delaware, United States
Lam Research SAS |  | France
Lam Research GmbH |  | Germany
Lam Research (H.K.) Limited |  | Hong Kong
Novellus Systems Service (Hong Kong) Limited |  | Hong Kong
Lam Research Illionois IAG, Inc |  | Illinois, United States
Lam Research (India) Private Ltd. |  | India
Lam Research (Ireland) Limited |  | Ireland
Novellus Systems Ireland Ltd. |  | Ireland
Lam Research (Israel) Ltd. |  | Israel
Lam Research Services Ltd. |  | Israel
GaSonics Israel Ltd. |  | Israel
Novellus Systems International BV, Israel Branch |  | Israel
Lam Research S.r.l. |  | Italy
Novellus Systems Italy SRL (in liquidation) |  | Italy
Lam Research Co., Ltd. |  | Japan
Lam Research Luxembourg S.à.r.l. |  | Luxembourg
SpeedFam IPEC (Malaysia) Sdn. Bhd. |  | Malaysia
Lam Research Malaysia Sdn. Bhd. |  | Malaysia
LAM Research B.V. |  | Netherlands
Lam Research International B.V. |  | Netherlands
Peter Wolters International Holding Company B.V. |  | Netherlands
Novellus Systems International B.V. |  | Netherlands
Voumard, Inc. |  | New York, United States
Lam Research Korea Limited |  | Republic of Korea

SUBSIDIARY |  | STATE OR OTHER JURISDICTION OF OPERATION
Lam Research Korea LLC YH |  | Republic of Korea
Novellus Singapore Pte. Ltd., Korea Branch |  | Republic of Korea
Corus Manufacturing Ltd. |  | Republic of Korea
Lam Research Singapore Pte Ltd |  | Singapore
Novellus Systems International BV, Singapore Branch |  | Singapore
Novellus Singapore Pte. Ltd. |  | Singapore
Novellus Singapore Holdings Pte. Ltd. |  | Singapore
Lam Research Holding GmbH |  | Switzerland
Lam Research International Sàrl |  | Switzerland
Novellus Systems (Schweiz) Holding GmbH |  | Switzerland
Voumard Machines Co SARL |  | Switzerland
Lam Research Co., Ltd. |  | Taiwan
Lam Research (H.K.) Limited, Taiwan Branch |  | Taiwan
Novellus Systems Service (Hong Kong) Limited, Taiwan Branch |  | Taiwan
Lam Research Ltd. |  | United Kingdom
Metryx, Ltd. |  | United Kingdom
Lam Research IAG (U.K.) Ltd |  | United Kingdom
Novellus Systems UK Limited |  | United Kingdom