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| SUBSIDIARY (as of August 17, 2021) | STATE OR OTHER JURISDICTION OF OPERATION |
| Lam Research AG | Austria |
| Lam Research Management GmbH | Austria |
| Lam Research Belgium BV | Belgium |
| Novellus Systems, Inc. | California, United States |
| Novellus Systems International, LLC | California, United States |
| Lam Research International Holdings Ltd. | Cayman Islands |
| Lam Research Capital Ltd. | Cayman Islands |
| Lam Research (Shanghai) Co., Ltd. | China |
| Lam Research Service Co., Ltd. | China |
| Coventor, Inc. | Delaware, United States |
| Lam Research Capital LLC | Delaware, United States |
| Lam Research International Holding Company | Delaware, United States |
| Silfex, Inc. | Delaware, United States |
| SpeedFam-IPEC International Services, LLC | Delaware, United States |
| Coventor Sàrl | France |
| Lam Research SAS | France |
| Lam Research GmbH | Germany |
| Lam Research (H.K.) Limited | Hong Kong |
| Lam Research Illinois IAG, Inc | Illinois, United States |
| Lam Research (India) Private Limited | India |
| Lam Research (Ireland) Limited | Ireland |
| Lam Research (Israel) Ltd. | Israel |
| Lam Research Services Ltd. | Israel |
| Lam Research S.r.l. | Italy |
| Lam Research GK | Japan |
| Lam Research Luxembourg S.à.r.l. | Luxembourg |
| Lam Research Malaysia Sdn. Bhd. | Malaysia |
| Lam Research International Sdn. Bhd. | Malaysia |
| Lam Research B.V. | Netherlands |
| Lam Research International B.V. | Netherlands |
| Lam Research Korea Limited | Republic of Korea |
| Lam Research Korea LLC YH | Republic of Korea |
| Lam Research Korea Technology LLC YH | Republic of Korea |
| Lam Research Manufacturing Korea LLC | Republic of Korea |
| Lam Research Singapore Pte Ltd | Singapore |
| Lam Research Holding GmbH | Switzerland |
| Lam Research International Sàrl | Switzerland |
| Lam Research Co., Ltd. | Taiwan |
| Lam Research (H.K.) Limited, Taiwan Branch | Taiwan |
| Talus Manufacturing, Ltd. | Taiwan |