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REVENUE - Schedule of System Revenues of Primary Markets (Details) - Systems revenue	3 Months Ended		6 Months Ended
	Dec. 27, 2020	Dec. 29, 2019	Dec. 27, 2020	Dec. 29, 2019
Memory
Concentration Risk [Line Items]
Primary market revenue, percent	68.00%	52.00%	63.00%	58.00%
Foundry
Concentration Risk [Line Items]
Primary market revenue, percent	26.00%	36.00%	31.00%	31.00%
Logic/integrated device manufacturing
Concentration Risk [Line Items]
Primary market revenue, percent	6.00%	12.00%	6.00%	11.00%

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