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Litigation and Other Legal Matters Litigation and Other Legal Matters (Details) $ in Thousands	Jan. 23, 2017 USD ($)	Dec. 29, 2015 action	Nov. 10, 2015 action	Oct. 21, 2015 action stockholder
California class actions and Delaware Chancery Court class action | Merger-related litigation
Loss Contingencies [Line Items]
Number of actions filed		4
California class actions and Delaware Chancery Court class action | Merger-related litigation | Subsequent Event
Loss Contingencies [Line Items]
Payments for plaintiffs' attorneys' fees and expenses | $	$ 140
California class actions
Loss Contingencies [Line Items]
Number of actions filed				3
Delaware Chancery Court class action
Loss Contingencies [Line Items]
Number of actions filed			1
KLA-Tencor | California class actions
Loss Contingencies [Line Items]
Number of stockholders filing putative class actions | stockholder				4

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