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Description of Business and Basis of Presentation - Terminated Merger Agreement (Details)	Oct. 05, 2016 USD ($)
KLA-Tencor Lam Research Merger
Business Acquisition [Line Items]
Termination Fee	$ 0

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- Definition

Business Combination, Merger Terms, Termination Fee

+ References

No definition available.

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- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

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