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Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)
$ in Thousands
 9 Months Ended
Mar. 31, 2017
USD ($)
reporting_unit
Jun. 30, 2014
USD ($)
Goodwill    
Number of reporting units | reporting_unit 4  
Goodwill    
Balance as of June 30, 2016 $ 335,177  
Goodwill adjustment 59  
Balance as of March 31, 2017 335,236  
Accumulated impairment loss   $ 277,600
Wafer Inspection    
Goodwill    
Balance as of June 30, 2016 281,026  
Goodwill adjustment 59  
Balance as of March 31, 2017 281,085  
Patterning    
Goodwill    
Balance as of June 30, 2016 53,255  
Goodwill adjustment 0  
Balance as of March 31, 2017 53,255  
Others    
Goodwill    
Balance as of June 30, 2016 896  
Goodwill adjustment 0  
Balance as of March 31, 2017 $ 896