EX-21.1 3 exhibit21106302018.htm LIST OF SUBSIDIARIES
Exhibit 21.1
KLA-Tencor Corporation
List of Subsidiaries as of June 30, 2018

Name |  | State or Other Jurisdiction of Incorporation / Organization
DOMESTIC SUBSIDIARIES |  |
International Sales & Business, Inc. |  | California
KLA-Tencor China Corporation |  | California
KLA-Tencor International Corporation |  | California
VLSI Standards, Inc. |  | California
ADE International Corporation |  | Delaware
Belize Holdings, LLC |  | Delaware
KLA-Tencor Asia-Pac Distribution Corporation |  | Delaware
KT Venture Group, L.L.C. |  | Delaware
KT Venture Group II, L.L.C. |  | Delaware
Dino Acquisition Technology L.L.C. |  | Delaware
Zeta Instruments, Inc. |  | Delaware
KT Recreation Association, LLC |  | Delaware
INTERNATIONAL SUBSIDIARIES |  |
ICOS Vision Systems Corporation BVBA |  | Belgium
ICOS Vision Systems NV |  | Belgium
Lee Ta Technologies (BVI), Inc. |  | British Virgin Islands
KLA-Tencor Corporation (Cayman) Limited, I |  | Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, III |  | Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, IV |  | Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, V |  | Cayman Islands
ICOS Vision Systems (Shenzhen) Co. Ltd. |  | China
KLA-Tencor International Trading (Shanghai) Co., Ltd. |  | China
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd. |  | China
Zeta Instruments (Shanghai) Co., Ltd. |  | China
KLA-Tencor France SARL |  | France
KLA-Tencor GmbH |  | Germany
KLA-Tencor MIE GmbH |  | Germany
KLA-Tencor MIE Holdings GmbH & Co. KG |  | Germany
KLA-Tencor MIE Holdings Verwaltungs GmbH |  | Germany
ICOS Vision Systems Ltd. |  | Hong Kong
KLA-Tencor Software India Private Limited |  | India
KLA-Tencor Ireland Ltd. |  | Ireland
Optical Metrology Patents Limited |  | Ireland
KLA-Tencor Corporation (Israel) |  | Israel
KLA-Tencor Corporation Holding (1987) Ltd. |  | Israel
KLA-Tencor Corporation (1992) Ltd. |  | Israel
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. |  | Israel
Tiburon-Sub Technologies Ltd. |  | Israel
Tiburon Merger Sub Technologies Ltd. |  | Israel
KLA-Tencor Italy S.R.L. |  | Italy

Name |  | State or Other Jurisdiction of Incorporation / Organization
KLA-Tencor Japan, Ltd. |  | Japan
KLA-Tencor Korea, Inc. |  | Korea
KLA-Tencor MIE Holdings S.à r.l. |  | Luxembourg
KLA-Tencor (Malaysia) Sdn Bhd |  | Malaysia
KLA-Tencor (Singapore) Pte. Ltd. |  | Singapore
KLA-Tencor Singapore Holding Co. Pte. Ltd. |  | Singapore
KLA-Tencor Singapore Holding Co. Pte II Ltd. |  | Singapore
KLA Instruments S.A. |  | Switzerland
KLA-Tencor (Thailand) Limited |  | Thailand
KLA-Tencor Limited |  | United Kingdom