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  <xsd:element abstract="true" id="klac_InstallmentAnniversaryDomain" name="InstallmentAnniversaryDomain" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_IntangibleAssetsOtherAccumulatedAdjustments" name="IntangibleAssetsOtherAccumulatedAdjustments" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="klac_InterestIncomeAndOtherNetMember" name="InterestIncomeAndOtherNetMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_InterestRateContract2018RateLockAgreementsMember" name="InterestRateContract2018RateLockAgreementsMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_InterestRatePriorToExpectedDebtIssuancesMember" name="InterestRatePriorToExpectedDebtIssuancesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_LineOfCreditFacilityAccordionFeatureIncreaseLimit" name="LineOfCreditFacilityAccordionFeatureIncreaseLimit" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="klac_LineOfCreditFacilityIncreaseLimit" name="LineOfCreditFacilityIncreaseLimit" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="klac_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFour" name="LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFour" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="klac_LongTermIncentivePlanCommittedAmount" name="LongTermIncentivePlanCommittedAmount" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="klac_LongTermIncentivePlanGrantedAmount" name="LongTermIncentivePlanGrantedAmount" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_MoneyMarketBankDepositsAndOtherMember" name="MoneyMarketBankDepositsAndOtherMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_NewRepurchaseProgramMember" name="NewRepurchaseProgramMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_NoncashOrPartNoncashAcquisitionContingentConsiderationPayable" name="NoncashOrPartNoncashAcquisitionContingentConsiderationPayable" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element id="klac_NoncashOrPartNoncashAcquisitionHoldbackConsiderationPayable" name="NoncashOrPartNoncashAcquisitionHoldbackConsiderationPayable" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element id="klac_NoncashTransactionIncreaseDecreaseInDividendsPayable" name="NoncashTransactionIncreaseDecreaseInDividendsPayable" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element id="klac_NumberOfCustomersWithSignificantAccountsReceivableBalance" name="NumberOfCustomersWithSignificantAccountsReceivableBalance" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="instant" />
  <xsd:element id="klac_NumberOfCustomersWithSignificantRevenue" name="NumberOfCustomersWithSignificantRevenue" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_NumberOfEsppSharesAvailableForFutureIssuance" name="NumberOfEsppSharesAvailableForFutureIssuance" nillable="true" substitutionGroup="xbrli:item" type="xbrli:sharesItemType" xbrli:periodType="instant" />
  <xsd:element id="klac_OffsettingAssetsandLiabilitiesTableTextBlock" name="OffsettingAssetsandLiabilitiesTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_OperatingCostsAndExpensesExcludingResearchAndDevelopmentExpense" name="OperatingCostsAndExpensesExcludingResearchAndDevelopmentExpense" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_OrbographLtd.Member" name="OrbographLtd.Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_OrbotechAndThreePrivatelyHeldCompaniesMember" name="OrbotechAndThreePrivatelyHeldCompaniesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_OrbotechLTSolarLLCMember" name="OrbotechLTSolarLLCMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_OrbotechMember" name="OrbotechMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_OtherAssetsCurrentAbstract" name="OtherAssetsCurrentAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_OtherCurrentAssets" name="OtherCurrentAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element id="klac_OtherExpenseIncomeNet" name="OtherExpenseIncomeNet" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element id="klac_OtherNonCurrentAssets" name="OtherNonCurrentAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element id="klac_OtherNoncurrentLiabilities1" name="OtherNoncurrentLiabilities1" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="klac_OtherReportingUnitsMember" name="OtherReportingUnitsMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_OtherRevenueMember" name="OtherRevenueMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_OutstandingGuaranteeArrangementsToFundCustomsGuaranteesForVatAndLc" name="OutstandingGuaranteeArrangementsToFundCustomsGuaranteesForVatAndLc" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element id="klac_OutstandingInventoryPurchaseCommitment" name="OutstandingInventoryPurchaseCommitment" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_PCBAndDisplayMember" name="PCBAndDisplayMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_PCBDisplayAndComponentInspectionMember" name="PCBDisplayAndComponentInspectionMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_PatterningMember" name="PatterningMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_PaymentsToAcquireBusinessGrossEquityInterest" name="PaymentsToAcquireBusinessGrossEquityInterest" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_PixCellMember" name="PixCellMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_PortionofSeniorNotesMember" name="PortionofSeniorNotesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_PrivatelyHeldCompanyMember" name="PrivatelyHeldCompanyMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ReceivablesSoldUnderFactoringAgreements" name="ReceivablesSoldUnderFactoringAgreements" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_RegularCashDividendMember" name="RegularCashDividendMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_RestOfAsiaMember" name="RestOfAsiaMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_RestrictedStockUnitMarketBasedAndServiceBasedMember" name="RestrictedStockUnitMarketBasedAndServiceBasedMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_RestrictedStockUnitPerformanceBasedAndServiceBasedMember" name="RestrictedStockUnitPerformanceBasedAndServiceBasedMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_RestrictedStockUnitServiceBasedMember" name="RestrictedStockUnitServiceBasedMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ScheduleOfIncomeTaxesDetailsTableTextBlock" name="ScheduleOfIncomeTaxesDetailsTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ScheduleOfSaleOfCertainTradeReceivablesAndPromissoryNotesFromCustomersWithoutRecourseTableTextBlock" name="ScheduleOfSaleOfCertainTradeReceivablesAndPromissoryNotesFromCustomersWithoutRecourseTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ScheduleofStockBasedCompensationCapitalizedInInventoryTableTextBlock" name="ScheduleofStockBasedCompensationCapitalizedInInventoryTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ScheduleofTaxBenefitsFromEmployeeStockPurchasePlanTableTextBlock" name="ScheduleofTaxBenefitsFromEmployeeStockPurchasePlanTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ScheduleofTaxBenefitsandGrantDateFairValueforRestrictedStockUnitsTableTextBlock" name="ScheduleofTaxBenefitsandGrantDateFairValueforRestrictedStockUnitsTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_SegmentPercentOfTotalRevenue" name="SegmentPercentOfTotalRevenue" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_SemiconductorProcessControlMember" name="SemiconductorProcessControlMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_SeniorManagementMember" name="SeniorManagementMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_SeniorNotesDueMarch152029Member" name="SeniorNotesDueMarch152029Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_SeniorNotesDueMarch152049Member" name="SeniorNotesDueMarch152049Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_SeniorNotesDueNovember12019Member" name="SeniorNotesDueNovember12019Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_SeniorNotesDueNovember12021Member" name="SeniorNotesDueNovember12021Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_SeniorNotesDueNovember12024Member" name="SeniorNotesDueNovember12024Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_SeniorNotesDueNovember12034Member" name="SeniorNotesDueNovember12034Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentOtherThanOptionsTradedForTaxesPeriodWeightedAverageGrantDateFairValue" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentOtherThanOptionsTradedForTaxesPeriodWeightedAverageGrantDateFairValue" nillable="true" substitutionGroup="xbrli:item" type="num:perShareItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodAdjustment" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodAdjustment" nillable="true" substitutionGroup="xbrli:item" type="xbrli:sharesItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodAdjustmentWeightedAverageGrantDateFairValue" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodAdjustmentWeightedAverageGrantDateFairValue" nillable="true" substitutionGroup="xbrli:item" type="num:perShareItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsWithheldForTaxes" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsWithheldForTaxes" nillable="true" substitutionGroup="xbrli:item" type="xbrli:sharesItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfEqualVestingInstallments" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfEqualVestingInstallments" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAvailableForGrantRollForward" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAvailableForGrantRollForward" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardPercentageOfEqualVestingInstallments" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPercentageOfEqualVestingInstallments" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_ShareRepurchaseProgramIncreaseToAuthorizedAmount" name="ShareRepurchaseProgramIncreaseToAuthorizedAmount" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="klac_SpecialtySemiconductorProcessMember" name="SpecialtySemiconductorProcessMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_StockBasedCompensationCapitalizedAsInventory" name="StockBasedCompensationCapitalizedAsInventory" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element id="klac_StockRepurchaseProgramUnsettledCommonStockRepurchase" name="StockRepurchaseProgramUnsettledCommonStockRepurchase" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="duration" />
  <xsd:element id="klac_TaxBenefitsFromEspp" name="TaxBenefitsFromEspp" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_ThirdAnniversaryMember" name="ThirdAnniversaryMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_ThreePrivatelyHeldCompaniesMember" name="ThreePrivatelyHeldCompaniesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_TradeNameTrademarkMember" name="TradeNameTrademarkMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_TwoPrivatelyHeldCompaniesMember" name="TwoPrivatelyHeldCompaniesMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_TwoThousandFourPlanMember" name="TwoThousandFourPlanMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="klac_WaferInspectionAndPatterningMember" name="WaferInspectionAndPatterningMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="klac_WeightedAverageFairValuePerShare" name="WeightedAverageFairValuePerShare" nillable="true" substitutionGroup="xbrli:item" type="num:perShareItemType" xbrli:periodType="duration" />
</xsd:schema>
