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BUSINESS COMBINATIONS (Details) - USD ($) |  |  | 3 Months Ended
--- | --- | --- | ---
Apr. 24, 2020 | Aug. 22, 2019 | Dec. 31, 2020
Business Acquisition |  |  |
Estimated additional consideration |  |  | $ 0
April 2020 acquisition |  |  |
Business Acquisition |  |  |
Total purchase consideration | $ 11,400,000 |  |
Acquired goodwill | $ 2,200,000 |  |
August 2019 acquisition |  |  |
Business Acquisition |  |  |
Total purchase consideration |  | $ 94,000,000.0 |
Additional consideration (up to) |  | $ 60,000,000.0 |
August 2019 acquisition | Wafer Inspection and Patterning |  |  |
Business Acquisition |  |  |
Acquired goodwill |  |  | 54,200,000
Other Acquisitions |  |  |
Business Acquisition |  |  |
Contingent consideration liability, non-current |  |  | $ 7,200,000

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