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BUSINESS COMBINATIONS (Details) - USD ($) | Apr. 24, 2020 | Aug. 22, 2019 | Mar. 31, 2021
--- | --- | --- | ---
April 2020 acquisition |  |  |
Business Acquisition |  |  |
Total purchase consideration | $ 11,400,000 |  |
Acquired goodwill | $ 2,200,000 |  |
August 2019 acquisition |  |  |
Business Acquisition |  |  |
Total purchase consideration |  | $ 94,000,000.0 |
Additional consideration (up to) |  | 60,000,000.0 |
Contingent consideration |  |  | $ 0
August 2019 acquisition | Wafer Inspection and Patterning |  |  |
Business Acquisition |  |  |
Acquired goodwill |  | $ 54,200,000 |
Other 2019 acquisitions |  |  |
Business Acquisition |  |  |
Contingent consideration |  |  | 7,400,000
Contingent consideration liability, current |  |  | 600,000
Contingent consideration liability, non-current |  |  | $ 6,800,000

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