EX-21.1 3 exhibit21106302022.htm LIST OF SUBSIDIARIES
Exhibit 21.1
KLA Corporation
List of Subsidiaries as of June 30, 2022

Name |  | State or Other Jurisdiction of Incorporation / Organization
DOMESTIC SUBSIDIARIES |  |
Anchor Semiconductor, Inc. |  | California
International Sales & Business, Inc. |  | California
KLA-Tencor China Corporation |  | California
KLA-Tencor International Corporation |  | California
VLSI Standards, Inc. |  | California
Belize Holdings, LLC |  | Delaware
ECI Technology, Inc. |  | New Jersey
ECI Technology International, Inc. |  | Delaware
KLA-Tencor Asia-Pac Distribution Corporation |  | Delaware
KT Venture Group, LLC |  | Delaware
KT Venture Group II, LLC |  | Delaware
KT Venture Management, LLC |  | California
Dino Acquisition Technology LLC |  | Delaware
Zeta Instruments, Inc. |  | Delaware
KT Recreation Association, LLC |  | Delaware
Whiskey Holding Sub, LLC |  | Delaware
Microsense, LLC |  | Delaware
Nanomechanics Inc. |  | Tennessee
Filmetrics, Inc. |  | California
Orbotech, Inc. |  | Delaware
Photon Dynamics, Inc. |  | California
Photon Dynamics Solar Corporation |  | Delaware
Orbotech LT Solar, LLC |  | Delaware
KLA Aleris Holding, LLC |  | Delaware
KLA FinCo LLC |  | Delaware
KLA Singapore LLC |  | Delaware
INTERNATIONAL SUBSIDIARIES |  |
Anchor (Shanghai) Semiconductor Inc. |  | Shanghai
ICOS Vision Systems Corporation BVBA |  | Belgium
ICOS Vision Systems NV |  | Belgium
Lee Ta Technologies (BVI), Inc. |  | British Virgin Islands
KLA-Tencor Corporation (Cayman) Limited, I |  | Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, III |  | Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, IV |  | Cayman Islands
ICOS Vision Systems (Shenzhen) Co. Ltd. |  | China
KLA-Tencor International Trading (Shanghai) Co., Ltd. |  | China
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd. |  | China
KLA-Tencor France SARL |  | France
KLA-Tencor GmbH |  | Germany
KLA-Tencor MIE GmbH |  | Germany
KLA-Tencor MIE Holdings GmbH & Co. KG |  | Germany
KLA-Tencor MIE Holdings Verwaltungs GmbH |  | Germany

Name |  | State or Other Jurisdiction of Incorporation / Organization
ICOS Vision Systems Ltd. |  | Hong Kong
KLA-Tencor Software India Private Limited |  | India
KLA-Tencor Ireland Ltd. |  | Ireland
Optical Metrology Patents Limited |  | Ireland
KLA-Tencor Corporation (Israel) |  | Israel
KLA-Tencor Corporation Holding (1987) Ltd. |  | Israel
KLA-Tencor Corporation (1992) Ltd. |  | Israel
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. |  | Israel
KLA-Tencor Italy S.R.L. |  | Italy
KLA-Tencor Japan, Ltd. |  | Japan
KLA-Tencor Korea, Inc. |  | Korea
KLA-Tencor MIE Holdings S.à r.l. |  | Luxembourg
KLA-Tencor (Malaysia) Sdn Bhd |  | Malaysia
KLA-Tencor (Singapore) Pte. Ltd. |  | Singapore
KLA-Tencor Singapore Holding Co. Pte. Ltd. |  | Singapore
KLA-Tencor Singapore Holding Co. Pte II Ltd. |  | Singapore
KLA-Tencor (Thailand) Limited |  | Thailand
KLA-Tencor Limited |  | United Kingdom
Lakers Holding Company APS |  | Denmark
Capres A/S |  | Denmark
ECI Japan KK |  | Japan
Hefei Shen’An Semiconductor Technology Co. |  | China
InnerSense |  | Israel
Orbotech Ltd |  | Israel
Orbograph Ltd. |  | Israel
Frontline P.C.B. Solutions Ltd. |  | Israel
Laser Imaging Systems GmbH |  | Germany
New System SRL |  | Italy
Orbotech Deutschland GmbH |  | Germany
Orbotech S.A. |  | Belgium
Orbotech Pacific Ltd. |  | Hong Kong
Orbotech Electronics (Shenzhen) Co., Ltd |  | China
Orbotech Electronics (Suzhou) Co Ltd |  | China
Orbotech Trading (Shanghai) Co., Ltd |  | China
Orbotech Japan Ltd |  | Japan
Orbotech Asia Ltd |  | Hong Kong
Orbotech Singapore Corporation Pte Ltd |  | Singapore
Orbotech Korea Ltd |  | Korea
Orbotech Logistics Ltd |  | Hong Kong
Ofek Technologies |  | Israel
SPTS Technologies Limited |  | UK
SPTS Technologies Ltd |  | Taiwan
SPTS Technologies (Shanghai) Co. Ltd. |  | China
SPTS Technologies UK Limited |  | UK
SPTS Technologies Overseas Holdings Ltd. |  | UK
Orbotech Technology Ventures Ltd. |  | Israel

Name |  | State or Other Jurisdiction of Incorporation / Organization
Orbotech Technology Ventures LP |  | Israel
Orbotech Holding GmbH |  | Germany
Orbotech B.V. |  | Netherlands
Orbotech Caribbean Ltd. |  | British Virgin Islands
Qoniac GmbH |  | Germany
Qoniac Korea Ltd. |  | Korea