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BUSINESS COMBINATIONS (Details) - USD ($) $ in Thousands |  |  | 6 Months Ended |
--- | --- | --- | --- | ---
Sep. 17, 2021 | Jul. 01, 2021 | Dec. 31, 2021 | Jun. 30, 2021
Business Acquisition |  |  |  |
Contingent consideration |  |  | $ 23,200 |
Goodwill |  |  | 2,042,794 | $ 2,011,172
Acquired goodwill |  |  | 31,621 |
Contingent consideration liability, current |  |  | 1,100 |
Contingent consideration liability, non-current |  |  | 22,100 |
Wafer Inspection and Patterning |  |  |  |
Business Acquisition |  |  |  |
Goodwill |  |  | 448,482 | $ 416,860
Acquired goodwill |  |  | 31,621 |
September 2021 acquisition |  |  |  |
Business Acquisition |  |  |  |
Total purchase consideration | $ 460,000 |  |  |
July 2021 acquisition |  |  |  |
Business Acquisition |  |  |  |
Total purchase consideration |  | $ 81,700 |  |
Additional consideration (up to) |  | 35,000 |  |
Contingent consideration |  |  | $ 13,000 |
Identifiable intangible assets |  | 31,700 |  |
Net tangible assets |  | 26,400 |  |
Deferred tax liabilities |  | 8,000 |  |
Goodwill |  | 31,600 |  |
July 2021 acquisition | Wafer Inspection and Patterning |  |  |  |
Business Acquisition |  |  |  |
Acquired goodwill |  | $ 31,600 |  |

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