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  <xs:element id="klac_WaferInspectionMember" abstract="true" name="WaferInspectionMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_MoneyMarketBankDepositsAndOtherMember" abstract="true" name="MoneyMarketBankDepositsAndOtherMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ImpactOnShareReserveMultiplier" abstract="false" name="ImpactOnShareReserveMultiplier" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:pureItemType"/>
  <xs:element id="klac_OtherLiabilitiesMiscellaneousNoncurrent" abstract="false" name="OtherLiabilitiesMiscellaneousNoncurrent" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_DebtInstrumentCovenantComplianceMaximumLeverageRatioUnderAMaterialAcquisitionOrSeriesOfMaterialAcquisitions" abstract="false" name="DebtInstrumentCovenantComplianceMaximumLeverageRatioUnderAMaterialAcquisitionOrSeriesOfMaterialAcquisitions" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:pureItemType"/>
  <xs:element id="klac_TaxYear2015And2016Member" abstract="true" name="TaxYear2015And2016Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_SeniorNotesDueMarch12050Member" abstract="true" name="SeniorNotesDueMarch12050Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_DisposalGroupIncludingDiscontinuedOperationAssetsLiabilitiesNet" abstract="false" name="DisposalGroupIncludingDiscontinuedOperationAssetsLiabilitiesNet" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFour" abstract="false" name="LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFour" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAvailableForGrantRollForward" abstract="true" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAvailableForGrantRollForward" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="klac_LesseeOperatingLeaseRemainingTermOfContract" abstract="false" name="LesseeOperatingLeaseRemainingTermOfContract" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="klac_DebtSecuritiesAvailableForSaleAndEquitySecuritiesAmortizedCost" abstract="false" name="DebtSecuritiesAvailableForSaleAndEquitySecuritiesAmortizedCost" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_AssumedEquityPlansMember" abstract="true" name="AssumedEquityPlansMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_OtherRevenueMember" abstract="true" name="OtherRevenueMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodAdjustment" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodAdjustment" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:sharesItemType"/>
  <xs:element id="klac_DebtInstrumentCovenantComplianceMaximumLeverageRatio" abstract="false" name="DebtInstrumentCovenantComplianceMaximumLeverageRatio" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:pureItemType"/>
  <xs:element id="klac_DisposalGroupNotDiscontinuedOperationPeriodExpectedToCompleteSale" abstract="false" name="DisposalGroupNotDiscontinuedOperationPeriodExpectedToCompleteSale" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="klac_TaxDeductibleAmortizationPeriod" abstract="false" name="TaxDeductibleAmortizationPeriod" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="klac_DebtSecuritiesAvailableForSaleAndEquitySecuritiesFairValue" abstract="false" name="DebtSecuritiesAvailableForSaleAndEquitySecuritiesFairValue" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_ScheduleOfSaleOfCertainTradeReceivablesAndPromissoryNotesFromCustomersWithoutRecourseTableTextBlock" abstract="false" name="ScheduleOfSaleOfCertainTradeReceivablesAndPromissoryNotesFromCustomersWithoutRecourseTableTextBlock" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:textBlockItemType"/>
  <xs:element id="klac_SeniorManagementMember" abstract="true" name="SeniorManagementMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_WaferInspectionAndPatterningMember" abstract="true" name="WaferInspectionAndPatterningMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ExecutiveDeferredSavingsPlan" abstract="false" name="ExecutiveDeferredSavingsPlan" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_OtherReportingUnitsMember" abstract="true" name="OtherReportingUnitsMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_FiniteLivedIntangibleAssetExpectedAmortizationYearFiveAndThereafter" abstract="false" name="FiniteLivedIntangibleAssetExpectedAmortizationYearFiveAndThereafter" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_DeferredCompensationArrangementWithIndividualVestingPeriod" abstract="false" name="DeferredCompensationArrangementWithIndividualVestingPeriod" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="klac_MarketableSecuritiesExcludingTimeDepositsFairValue" abstract="false" name="MarketableSecuritiesExcludingTimeDepositsFairValue" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedTangibleAssets" abstract="false" name="BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedTangibleAssets" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_RevenueRemainderPayableAcceptancePeriod" abstract="false" name="RevenueRemainderPayableAcceptancePeriod" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="klac_DisposalGroupIncludingDiscontinuedOperationMinorityInterest" abstract="false" name="DisposalGroupIncludingDiscontinuedOperationMinorityInterest" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_InterestIncomeAndOtherNetMember" abstract="true" name="InterestIncomeAndOtherNetMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_EquitySecuritiesFVNIAccumulatedGrossUnrealizedLoss" abstract="false" name="EquitySecuritiesFVNIAccumulatedGrossUnrealizedLoss" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_A2019SeniorNotesMember" abstract="true" name="A2019SeniorNotesMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ReceivablesSoldUnderFactoringAgreements" abstract="false" name="ReceivablesSoldUnderFactoringAgreements" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_IncreaseDecreaseInAccountsReceivablePercentage" abstract="false" name="IncreaseDecreaseInAccountsReceivablePercentage" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="klac_SeniorNotesDueNovember12034Member" abstract="true" name="SeniorNotesDueNovember12034Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_DeferredCompensationArrangementWithIndividualUnrecognizedCompensationLiability" abstract="false" name="DeferredCompensationArrangementWithIndividualUnrecognizedCompensationLiability" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_IndefiniteLivedIntangibleAssetsExcludingGoodwillNetOfOtherAccumulatedAdjustment" abstract="false" name="IndefiniteLivedIntangibleAssetsExcludingGoodwillNetOfOtherAccumulatedAdjustment" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateAfterOneThroughThreeYearsFairValue" abstract="false" name="DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateAfterOneThroughThreeYearsFairValue" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_TimeDepositsCashEquivalentsFairValue" abstract="false" name="TimeDepositsCashEquivalentsFairValue" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_WeightedAverageFairValuePerShare" abstract="false" name="WeightedAverageFairValuePerShare" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:perShareItemType"/>
  <xs:element id="klac_AnchorSemiconductorIncMember" abstract="true" name="AnchorSemiconductorIncMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_DebtInstrumentCovenantComplianceMinimumInterestExpenseCoverageRatio" abstract="false" name="DebtInstrumentCovenantComplianceMinimumInterestExpenseCoverageRatio" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:pureItemType"/>
  <xs:element id="klac_DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateAfterOneThroughThreeYearsAmortizedCost" abstract="false" name="DebtSecuritiesAvailableForSaleMaturityAllocatedAndSingleMaturityDateAfterOneThroughThreeYearsAmortizedCost" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_DebtInstrumentCovenantComplianceNumberofConsecutiveQuarters" abstract="false" name="DebtInstrumentCovenantComplianceNumberofConsecutiveQuarters" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:integerItemType"/>
  <xs:element id="klac_ContractWithCustomerLiabilityCurrentSystemRevenue" abstract="false" name="ContractWithCustomerLiabilityCurrentSystemRevenue" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_CashEquivalentsAndMarketableSecuritiesFairValueDisclosure" abstract="false" name="CashEquivalentsAndMarketableSecuritiesFairValueDisclosure" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_SpecialtySemiconductorProcessMember" abstract="true" name="SpecialtySemiconductorProcessMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_DebtSecuritiesAvailableForSaleAndEquitySecuritiesAccumulatedGrossUnrealizedLoss" abstract="false" name="DebtSecuritiesAvailableForSaleAndEquitySecuritiesAccumulatedGrossUnrealizedLoss" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_FiniteLivedIntangibleAssetsAccumulatedAmortizationAndOtherAccumulatedAdjustment" abstract="false" name="FiniteLivedIntangibleAssetsAccumulatedAmortizationAndOtherAccumulatedAdjustment" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_StockBasedCompensationCapitalizedAsInventory" abstract="false" name="StockBasedCompensationCapitalizedAsInventory" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_GuaranteeArrangementsToFundGuaranteesToCustomsAuthoritiesAmount" abstract="false" name="GuaranteeArrangementsToFundGuaranteesToCustomsAuthoritiesAmount" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_ContingentConsiderationPayableAndOtherNet" abstract="false" name="ContingentConsiderationPayableAndOtherNet" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_LesseeOperatingLeaseLiabilityToBePaidAfterYearFour" abstract="false" name="LesseeOperatingLeaseLiabilityToBePaidAfterYearFour" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_TaxBenefitsFromESPP" abstract="false" name="TaxBenefitsFromESPP" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_CashLongTermIncentivePlanMember" abstract="true" name="CashLongTermIncentivePlanMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_GuaranteeArrangementsToFundGuaranteesToCustomsAuthoritiesAmountIssued" abstract="false" name="GuaranteeArrangementsToFundGuaranteesToCustomsAuthoritiesAmountIssued" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_CommitmentsToSellReceivablesAndLettersofCreditAbstract" abstract="true" name="CommitmentsToSellReceivablesAndLettersofCreditAbstract" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="klac_IncreaseDecreaseInDeferredCompensationLiabilities" abstract="false" name="IncreaseDecreaseInDeferredCompensationLiabilities" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
</xs:schema>
