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  <xs:element id="klac_RestrictedStockUnitServiceBasedMember" abstract="true" name="RestrictedStockUnitServiceBasedMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsWithheldForTaxes" abstract="false" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsWithheldForTaxes" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:sharesItemType"/>
  <xs:element id="klac_CostOfSalesAndOperatingExpenseMember" abstract="true" name="CostOfSalesAndOperatingExpenseMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_OrbographLtd.Member" abstract="true" name="OrbographLtd.Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
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  <xs:element id="klac_SecondLargestCustomerMember" abstract="true" name="SecondLargestCustomerMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ComponentInspectionMember" abstract="true" name="ComponentInspectionMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_IncreaseDecreaseInDeferredCompensationLiabilities" abstract="false" name="IncreaseDecreaseInDeferredCompensationLiabilities" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_DisposalGroupIncludingDiscontinuedOperationTangibleAssets" abstract="false" name="DisposalGroupIncludingDiscontinuedOperationTangibleAssets" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_CashEquivalentsGrossUnrealizedLosses" abstract="false" name="CashEquivalentsGrossUnrealizedLosses" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_RevenuePaymentTermsRequiredPaymentPercentageOfTotalContractConsiderationWithin30To60DaysOfShipment" abstract="false" name="RevenuePaymentTermsRequiredPaymentPercentageOfTotalContractConsiderationWithin30To60DaysOfShipment" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="klac_PCBAndDisplayMember" abstract="true" name="PCBAndDisplayMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_BusinessCombinationContingentConsiderationLiabilityDeferredPayment" abstract="false" name="BusinessCombinationContingentConsiderationLiabilityDeferredPayment" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_GainLossonDeferredCompensationPlanAssets" abstract="false" name="GainLossonDeferredCompensationPlanAssets" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_LongTermIncentivePlanCommittedAmount" abstract="false" name="LongTermIncentivePlanCommittedAmount" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_StockRepurchaseProgramAuthorizedRepurchaseAmountIncreaseDuringPeriod" abstract="false" name="StockRepurchaseProgramAuthorizedRepurchaseAmountIncreaseDuringPeriod" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_InterestIncomeAndOtherNetMember" abstract="true" name="InterestIncomeAndOtherNetMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_EuropeAndIsraelMember" abstract="true" name="EuropeAndIsraelMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_CashEquivalentsFairValueDisclosure" abstract="false" name="CashEquivalentsFairValueDisclosure" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_WeightedAverageFairValuePerShare" abstract="false" name="WeightedAverageFairValuePerShare" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:perShareItemType"/>
  <xs:element id="klac_IncomeTaxExaminationCurrentYearElectionPaymentAmount" abstract="false" name="IncomeTaxExaminationCurrentYearElectionPaymentAmount" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_IncreaseDecreaseInContractWithCustomerAssetPercentage" abstract="false" name="IncreaseDecreaseInContractWithCustomerAssetPercentage" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:percentItemType"/>
  <xs:element id="klac_AcceleratedShareRepurchaseProgramNumberOfFinancialInstitutions" abstract="false" name="AcceleratedShareRepurchaseProgramNumberOfFinancialInstitutions" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:integerItemType"/>
  <xs:element id="klac_ImpairmentOfIntangibleAssetsPurchased" abstract="false" name="ImpairmentOfIntangibleAssetsPurchased" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_SeniorNotesDueMarch152049Member" abstract="true" name="SeniorNotesDueMarch152049Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_SeniorNotesDueJuly152052Member" abstract="true" name="SeniorNotesDueJuly152052Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ContractWithCustomerLiabilityCurrentSystemRevenue" abstract="false" name="ContractWithCustomerLiabilityCurrentSystemRevenue" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_ESPPMaximumAnnualShareReplenishment" abstract="false" name="ESPPMaximumAnnualShareReplenishment" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:sharesItemType"/>
  <xs:element id="klac_SeniorManagementMember" abstract="true" name="SeniorManagementMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_AssumedEquityPlansMember" abstract="true" name="AssumedEquityPlansMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAvailableForGrantRollForward" abstract="true" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAvailableForGrantRollForward" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="klac_OtherLiabilitiesMiscellaneousNoncurrent" abstract="false" name="OtherLiabilitiesMiscellaneousNoncurrent" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_IncreaseDecreaseInContractWithCustomerLiabilitySystemRevenue" abstract="false" name="IncreaseDecreaseInContractWithCustomerLiabilitySystemRevenue" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_RestOfAsiaMember" abstract="true" name="RestOfAsiaMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_CashLongTermIncentivePlanMember" abstract="true" name="CashLongTermIncentivePlanMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_LineOfCreditFacilityAccordionFeatureIncreaseLimit" abstract="false" name="LineOfCreditFacilityAccordionFeatureIncreaseLimit" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_AcceleratedShareRepurchasesStockRepurchasedShares" abstract="false" name="AcceleratedShareRepurchasesStockRepurchasedShares" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:sharesItemType"/>
  <xs:element id="klac_BuildingsAndLeaseholdImprovementsGross" abstract="false" name="BuildingsAndLeaseholdImprovementsGross" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_SeniorNotesDueJuly152062Member" abstract="true" name="SeniorNotesDueJuly152062Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_SpecialtySemiconductorProcessMember" abstract="true" name="SpecialtySemiconductorProcessMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_MoneyMarketFundsAndOther" abstract="false" name="MoneyMarketFundsAndOther" nillable="true" xbrli:periodType="instant" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_TwoThousandFourPlanMember" abstract="true" name="TwoThousandFourPlanMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_CommitmentsToSellReceivablesAndLettersofCreditAbstract" abstract="true" name="CommitmentsToSellReceivablesAndLettersofCreditAbstract" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:stringItemType"/>
  <xs:element id="klac_ReceivablesSoldUnderFactoringAgreements" abstract="false" name="ReceivablesSoldUnderFactoringAgreements" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_RestrictedStockUnitPerformanceBasedAndServiceBasedMember" abstract="true" name="RestrictedStockUnitPerformanceBasedAndServiceBasedMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_DeferredCompensationArrangementWithIndividualVestingPeriod" abstract="false" name="DeferredCompensationArrangementWithIndividualVestingPeriod" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="klac_NoncashTransactionIncreaseDecreaseInDividendsPayable" abstract="false" name="NoncashTransactionIncreaseDecreaseInDividendsPayable" nillable="true" xbrli:periodType="duration" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_WaferInspectionMember" abstract="true" name="WaferInspectionMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_ContractWithCustomerLiabilityCurrentServiceRevenue" abstract="false" name="ContractWithCustomerLiabilityCurrentServiceRevenue" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_SemiconductorProcessControlMember" abstract="true" name="SemiconductorProcessControlMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_SeniorNotesDueMarch12050Member" abstract="true" name="SeniorNotesDueMarch12050Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_SeniorNotesDueNovember12034Member" abstract="true" name="SeniorNotesDueNovember12034Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_LargestCustomerMember" abstract="true" name="LargestCustomerMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_SeniorNotesDueJuly152032Member" abstract="true" name="SeniorNotesDueJuly152032Member" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_DebtInstrumentCovenantComplianceMaximumLeverageRatioUnderAMaterialAcquisitionOrSeriesOfMaterialAcquisitions" abstract="false" name="DebtInstrumentCovenantComplianceMaximumLeverageRatioUnderAMaterialAcquisitionOrSeriesOfMaterialAcquisitions" nillable="true" xbrli:periodType="instant" substitutionGroup="xbrli:item" type="xbrli:pureItemType"/>
  <xs:element id="klac_LesseeOperatingLeaseRemainingTermOfContract" abstract="false" name="LesseeOperatingLeaseRemainingTermOfContract" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="xbrli:durationItemType"/>
  <xs:element id="klac_RestrictedStockUnitMarketBasedAndServiceBasedMember" abstract="true" name="RestrictedStockUnitMarketBasedAndServiceBasedMember" nillable="true" xbrli:periodType="duration" substitutionGroup="xbrli:item" type="dtr-types:domainItemType"/>
  <xs:element id="klac_AcquisitionRelatedChargesCorporateAllocationsAndEffectsOfForeignExchangeRates" abstract="false" name="AcquisitionRelatedChargesCorporateAllocationsAndEffectsOfForeignExchangeRates" nillable="true" xbrli:periodType="duration" xbrli:balance="debit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
  <xs:element id="klac_LesseeOperatingLeaseLiabilityToBePaidAfterYearFour" abstract="false" name="LesseeOperatingLeaseLiabilityToBePaidAfterYearFour" nillable="true" xbrli:periodType="instant" xbrli:balance="credit" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType"/>
</xs:schema>
