EX-21.1 3 exhibit21106302025.htm LIST OF SUBSIDIARIES
Exhibit 21.1
KLA Corporation
List of Subsidiaries as of June 30, 2025

Name |  | State or Other Jurisdiction of Incorporation / Organization
DOMESTIC SUBSIDIARIES |  |
Anchor Semiconductor, Inc. |  | California
Belize Holdings, LLC |  | Delaware
Dino Acquisition Technology L.L.C. |  | Delaware
ECI Technology International, Inc. |  | Delaware
Front Edge Technology Inc. |  | California
International Sales & Business, Inc. |  | California
KLA Aleris Holding, LLC |  | Delaware
KLA EUVMI, LLC |  | Delaware
KLA-Tencor Asia-Pac Distribution Corporation |  | Delaware
KLA-Tencor China Corporation |  | California
KLA-Tencor International Corporation |  | California
KT Recreation Association, LLC |  | Delaware
KT Venture Group II, L.L.C. |  | Delaware
KT Venture Group, L.L.C. |  | Delaware
KT Venture Management, L.L.C. |  | Delaware
Nanomechanics Inc. |  | Tennessee
Orbotech LT Solar, LLC |  | Delaware
VLSI Standards, Inc. |  | California
Whiskey Holding Sub, LLC |  | Delaware
Zeta Instruments, Inc. |  | Delaware
INTERNATIONAL SUBSIDIARIES |  |
Anchor (Shanghai) Semiconductor Inc. |  | Shanghai
Capres A/S |  | Denmark
Frontline P.C.B. Solutions Ltd. |  | Israel
ICOS Vision Systems (Shenzhen) Co. Ltd. |  | China
ICOS Vision Systems Corporation |  | Belgium
ICOS Vision Systems Ltd. |  | Hong Kong
ICOS Vision Systems NV |  | Belgium
KLA Corporation UK Ltd |  | United Kingdom
KLA Corporation UK Holdings Ltd |  | United Kingdom
KLA Finco Pte. Ltd. |  | Singapore
KLA-Tencor (Malaysia) Sdn Bhd |  | Malaysia
KLA-Tencor (Singapore) Pte. Ltd. |  | Singapore
KLA-Tencor (Thailand) Limited |  | Thailand
KLA-Tencor Corporation (1992) Ltd. |  | Israel
KLA-Tencor Corporation (Cayman) Limited, I |  | Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, III |  | Cayman Islands
KLA-Tencor Corporation (Israel) |  | Israel
KLA-Tencor Corporation Holding (1987) Ltd. |  | Israel
KLA-Tencor France SARL |  | France
KLA-Tencor GmbH |  | Germany
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. |  | Israel
KLA-Tencor International Trading (Shanghai) Co., Ltd. |  | China
KLA-Tencor Ireland Ltd. |  | Ireland

KLA-Tencor Italy S.R.L. |  | Italy
KLA-Tencor Japan, Ltd. |  | Japan
KLA-Tencor Korea, Inc. |  | Korea
KLA-Tencor MIE GmbH |  | Germany
KLA-Tencor MIE Holdings GmbH & Co. KG |  | Germany
KLA-Tencor MIE Holdings S.à r.l. |  | Luxembourg
KLA-Tencor MIE Holdings Verwaltungs GmbH |  | Germany
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd. |  | China
KLA-Tencor Singapore Holding Co. Pte II Ltd. |  | Singapore
KLA-Tencor Singapore Holding Co. Pte. Ltd. |  | Singapore
KLA-Tencor Software India Private Limited |  | India
Lakers Holding Company APS |  | Denmark
Laser Imaging Systems GmbH |  | Germany
Lee Ta Technologies (BVI), Inc. |  | British Virgin Islands
New System SRL |  | Italy
Orbotech Asia Ltd |  | Hong Kong
Orbotech B.V. |  | Netherlands
Orbotech Electronics (Shenzhen) Co., Ltd |  | China
Orbotech Electronics (Suzhou) Co Ltd |  | China
Orbotech Holding GmbH |  | Germany
Orbotech Korea Ltd |  | Korea
Orbotech Ltd |  | Israel
Orbotech Pacific Ltd. |  | Hong Kong
Orbotech NV |  | Belgium
Orbotech Technology Ventures Ltd. |  | Israel
Orbotech Trading (Shanghai) Co., Ltd |  | China