0000857005-06-000025 4 1 20061102 20061103 20061103 MOSES CORNELIUS F III 0001195652 4 34 000-18059 061185953 AXCELIS TECHNOLOGIES INC BEVERLY MA 01915-1053 PARAMETRIC TECHNOLOGY CORP 0000857005 7372 042866152 MA 0930 140 KENDRICK STREET NEEDHAM MA 02494 7813705000 140 KENDRICK STREET NEEDHAM MA 02494 4 1 primary_doc.xml PRIMARY DOCUMENT