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Consolidated Statements of Cash Flows - USD ($)
$ in Thousands
 12 Months Ended
Dec. 31, 2024
Dec. 31, 2023
Dec. 31, 2022
Cash flows from operating activities:      
Net income (loss) $ 1,292,044 $ 830,777 $ (44,166)
Adjustments to reconcile net income (loss) to cash provided by operating activities:      
Depreciation, amortization and accretion 423,498 307,994 269,724
Impairments and net losses on disposal of long-lived assets 1,360 1,568 63,338
Share-based compensation 28,104 34,219 28,656
Deferred income taxes (54,754) (60,813) (12,799)
Gain on sales of businesses, net (1,115) (6,883) (253,511)
Liabilities assumed by customers for the sale of systems 0 0 (145,281)
Gain on debt forgiveness 0 0 (30,201)
Other, net 11,982 22,062 (1,029)
Changes in operating assets and liabilities      
Accounts receivable, trade (505,336) (304,183) 118,724
Inventories (276,807) (205,106) 16,693
Government Grants Receivable 270,300 (659,745) 0
Other assets (311,363) (215,707) (86,938)
Income tax receivable and payable 47,421 8,656 43,592
Accounts payable and accrued expenses 268,731 79,328 5,569
Deferred revenue 698 783,207 912,946
Other liabilities 23,236 (13,114) (11,948)
Net cash provided by operating activities 1,217,999 602,260 873,369
Cash flows from investing activities:      
Purchases of property, plant and equipment (1,526,076) (1,386,775) (903,605)
Purchases of marketable securities and restricted marketable securities (2,516,097) (3,612,801) (3,375,008)
Proceeds from sales and maturities of marketable securities 2,491,857 4,563,890 2,646,787
Proceeds from sales of businesses, net of cash and restricted cash sold 0 7,680 442,302
Acquisitions, net of cash acquired 0 (35,739) 0
Other investing activities (12,991) (9,046) (3,050)
Net cash used in investing activities (1,563,307) (472,791) (1,192,574)
Cash flows from financing activities:      
Proceeds from borrowings under debt arrangements, net of issuance costs 258,461 367,983 397,380
Repayment of debt (205,821) 0 (75,896)
Payments of tax withholdings for restricted shares (20,178) (31,130) (12,092)
Contingent consideration payment and other financing activities (7,613) 0 0
Net cash provided by financing activities 24,849 336,853 309,392
Effect of exchange rate changes on cash, cash equivalents, restricted cash, and restricted cash equivalents (6,387) 5,285 47,438
Net (decrease) increase in cash, cash equivalents, restricted cash, and restricted cash equivalents (326,846) 471,607 37,625
Cash, cash equivalents, restricted cash, and restricted cash equivalents, beginning of the period 1,965,069 1,493,462 1,455,837
Cash, cash equivalents, restricted cash, and restricted cash equivalents, end of the period 1,638,223 1,965,069 1,493,462
Supplemental disclosure of noncash investing and financing activities:      
Property, plant and equipment acquisitions funded by liabilities 185,618 249,455 315,961
Proceeds to be received from asset-based government grants 171,920 152,208 0
Acquisitions funded by contingent consideration $ 6,500 $ 18,500 $ 0