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Segment Information - Product Revenues by Systems and Software (Details) - USD ($)
$ in Thousands
3 Months Ended 6 Months Ended
Mar. 31, 2024
Mar. 31, 2023
Mar. 31, 2024
Mar. 31, 2023
Product Information [Line Items]        
Revenue from contract with customer, excluding assessed tax $ 681,354 $ 703,175 $ 1,373,951 $ 1,403,553
Product        
Product Information [Line Items]        
Revenue from contract with customer, excluding assessed tax 300,162 340,581 606,021 681,139
Systems | Product        
Product Information [Line Items]        
Revenue from contract with customer, excluding assessed tax 141,654 208,689 277,028 381,721
Software | Product        
Product Information [Line Items]        
Revenue from contract with customer, excluding assessed tax $ 158,508 $ 131,892 $ 328,993 $ 299,418