POWER OF ATTORNEY

     Know all by these presents, that the undersigned hereby constitutes and

appoints Peter W. Walcott the undersigned's true and lawful attorney-in-fact to:

(1) prepare, execute in the undersigned's name and on the

undersigned's

behalf, and submit to the U.S. Securities and Exchange Commission (the "SEC")

a Form ID, including amendments thereto, and any other documents necessary

or appropriate to obtain codes and passwords enabling the

undersigned to make electronic filings with the SEC of reports required by

Section 16(a) of the Securities Exchange Act of 1934 or any rule or

regulation of the SEC;

(2) execute for and on behalf of the undersigned, In the undersigned's

capacity

as an officer and/or director of Entegris, Inc. (the "Company), Forms 3,

4, and 5 in accordance with Section 16(a) of the Securities Exchange

Act of. 1934 and the rules thereunder, and any other forms or reports

the undersigned may be required to file in connection with the

undersigned's ownership, acquisition, or disposition of securities of

the Company;

(3) do and perform any and all acts for and on behalf of the undersigned

which

may be necessary or desirable to complete and execute any such

Form 3, 4, or 5, complete and execute any amendment or amendments thereto,

and timely file such form with the SEC and any stock exchange or

similar authority; and

(4) take any other action of any type whatsoever In connection with the

foregoing which, in the opinion of such attorney-in-fact, may be of

benefit to, in the best interest of, or legally required by, the

undersigned, it being understood that the documents executed by

such attorney-in-fact on behalf of the undersigned pursuant to this

Power of Attorney shall be in such form and shall contain such terms and

conditions as such attorney-in-fact may approve in such attorney-in-fact's

discretion.

     The undersigned hereby grants to each such attorney-in-fact full power and

authority to do and perform any and every act and thing whatsoever requisite,

necessary, or proper to be done in the exercise of any of the rights and powers

herein granted, as fully to all intents and purposes as the undersigned might or

could do if personally present, with full power of substitution or revocation, hereby

ratifying and confirming all that such attorney-in-fact, or such attorney-in-fact's

substitute or substitutes, shall lawfully do or cause to be done by virtue of this

power of attorney and the rights and powers herein granted. The undersigned

acknowledges that the foregoing attorneys-In-fact, in serving in such capacity at the

request of the undersigned, are not assuming, nor is the Company assuming, any of the

undersigned's responsibilities to comply with Section 16 of the Securities

Exchange Act of 1934.





      This Power of Attorney shall remain in full force and effect until the

undersigned is no longer required to file Forms 3, 4, and 5 with respect to the

undersigned's holdings of and transactions in securities issued by the Company,

unless earlier revoked by the undersigned in a signed writing delivered to the

foregoing attorneys-in-fact.

      IN WITNESS WHEREOF, the undersigned has caused this Power of

Attorney to be executed as of this ,W day of  June, 2012.



Michael Sauer