<SEC-DOCUMENT>0000940454-16-000006-index.html : 20160519
<SEC-HEADER>0000940454-16-000006.hdr.sgml : 20160519
<ACCEPTANCE-DATETIME>20160519130704
ACCESSION NUMBER:		0000940454-16-000006
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20160517
FILED AS OF DATE:		20160519
DATE AS OF CHANGE:		20160519

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ENTEGRIS INC
		CENTRAL INDEX KEY:			0001101302
		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
		IRS NUMBER:				411941551
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
		BUSINESS PHONE:		9784366500

	MAIL ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			SULLIVAN BRIAN F
		CENTRAL INDEX KEY:			0000940454
		STATE OF INCORPORATION:			MN
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-32598
		FILM NUMBER:		161662582

	MAIL ADDRESS:	
		STREET 1:		2229 EDGEWOOD AVENUE SOUTH
		CITY:			MINNEAPOLIS
		STATE:			MN
		ZIP:			55426
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: edgar.html

Document 1 - RAW XML: edgar.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>poasullivan517.htm
<DESCRIPTION>POWER OF ATTORNEY FOR BRIAN F. SULLIVAN
<TEXT>
Document 2 - file: poasullivan517.htm

</DOCUMENT>
</SEC-DOCUMENT>