<SEC-DOCUMENT>0001483553-16-000003-index.html : 20160623
<SEC-HEADER>0001483553-16-000003.hdr.sgml : 20160623
<ACCEPTANCE-DATETIME>20160623150431
ACCESSION NUMBER:		0001483553-16-000003
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20160613
FILED AS OF DATE:		20160623
DATE AS OF CHANGE:		20160623

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ENTEGRIS INC
		CENTRAL INDEX KEY:			0001101302
		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
		IRS NUMBER:				411941551
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
		BUSINESS PHONE:		9784366500

	MAIL ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Haris Clinton M.
		CENTRAL INDEX KEY:			0001483553

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-32598
		FILM NUMBER:		161728517

	MAIL ADDRESS:	
		STREET 1:		C/O BROOKS AUTOMATION, INC.
		STREET 2:		15 ELIZABETH DRIVE
		CITY:			CHELMSFORD
		STATE:			MA
		ZIP:			08124
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
Document 1 - file: edgar.html

Document 1 - RAW XML: edgar.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>poaharis623.htm
<DESCRIPTION>POWER OF ATTORNEY FOR CLINT HARIS
<TEXT>
Document 2 - file: poaharis623.htm

</DOCUMENT>
</SEC-DOCUMENT>