<SEC-DOCUMENT>0001226867-18-000002.txt : 20180510
<SEC-HEADER>0001226867-18-000002.hdr.sgml : 20180510
<ACCEPTANCE-DATETIME>20180510165211
ACCESSION NUMBER:		0001226867-18-000002
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20180509
FILED AS OF DATE:		20180510
DATE AS OF CHANGE:		20180510

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			OLSON PAUL L H
		CENTRAL INDEX KEY:			0001226867

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-32598
		FILM NUMBER:		18823714

	MAIL ADDRESS:	
		STREET 1:		C/O ENTEGRIS INC
		STREET 2:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ENTEGRIS INC
		CENTRAL INDEX KEY:			0001101302
		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
		IRS NUMBER:				411941551
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
		BUSINESS PHONE:		9784366500

	MAIL ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0306</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2018-05-09</periodOfReport>

    <issuer>
        <issuerCik>0001101302</issuerCik>
        <issuerName>ENTEGRIS INC</issuerName>
        <issuerTradingSymbol>ENTG</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001226867</rptOwnerCik>
            <rptOwnerName>OLSON PAUL L H</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O ENTEGRIS, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>129 CONCORD ROAD</rptOwnerStreet2>
            <rptOwnerCity>BILLERICA</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01821</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2018-05-09</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>4090</value>
                    <footnoteId id="F1"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                    <footnoteId id="F2"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>49454</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value></value>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">These Restricted Stock Units vest in full on the earlier of (1) the anniversary date of the grant, or (2) the date of the Company's 2019 Annual Meeting of Stockholders.</footnote>
        <footnote id="F2">These shares were awarded on May 9, 2018 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>/s/ Sue Lee, Attorney-In-Fact for Paul Olson</signatureName>
        <signatureDate>2018-05-10</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
