    <SEC-DOCUMENT>0001101302-23-000045-index.html : 20230317
    <SEC-HEADER>0001101302-23-000045.hdr.sgml : 20230317
    <ACCEPTANCE-DATETIME>20230317114500
    ACCESSION NUMBER:		0001101302-23-000045
    CONFORMED SUBMISSION TYPE:	ARS
    PUBLIC DOCUMENT COUNT:		1
    CONFORMED PERIOD OF REPORT:	20230317
    FILED AS OF DATE:		20230317
    DATE AS OF CHANGE:		20230317
    EFFECTIVENESS DATE:		20230317

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			ENTEGRIS INC
    		CENTRAL INDEX KEY:			0001101302
    		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
    		IRS NUMBER:				411941551
    		STATE OF INCORPORATION:			DE
    		FISCAL YEAR END:			1231

    	FILING VALUES:
    		FORM TYPE:		ARS
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	001-32598
    		FILM NUMBER:		23741286

    	BUSINESS ADDRESS:
    		STREET 1:		129 CONCORD ROAD
    		CITY:			BILLERICA
    		STATE:			MA
    		ZIP:			01821
    		BUSINESS PHONE:		9784366500

    	MAIL ADDRESS:
    		STREET 1:		129 CONCORD ROAD
    		CITY:			BILLERICA
    		STATE:			MA
    		ZIP:			01821
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>ARS
    <SEQUENCE>1
    <FILENAME>a202210k.pdf
    <DESCRIPTION>2022 10K ARS
    <TEXT>
    Document 1 - file: a202210k.pdf

    </DOCUMENT>
    </SEC-DOCUMENT>