<SEC-DOCUMENT>0001101302-24-000061-index.html : 20240906
<SEC-HEADER>0001101302-24-000061.hdr.sgml : 20240906
<ACCEPTANCE-DATETIME>20240906133348
ACCESSION NUMBER:		0001101302-24-000061
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20240905
FILED AS OF DATE:		20240906
DATE AS OF CHANGE:		20240906

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			PUMA MARY G
		CENTRAL INDEX KEY:			0001158015
		ORGANIZATION NAME:           	

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-32598
		FILM NUMBER:		241283856

	MAIL ADDRESS:	
		STREET 1:		AXCELIS TECHNOLOGIES INC.
		STREET 2:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ENTEGRIS INC
		CENTRAL INDEX KEY:			0001101302
		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		IRS NUMBER:				411941551
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
		BUSINESS PHONE:		9784366500

	MAIL ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>wk-form3_1725644022.xml
<DESCRIPTION>FORM 3
<TEXT>
Document 1 - file: wk-form3_1725644022.html

Document 1 - RAW XML: wk-form3_1725644022.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>poa_puma.txt
<DESCRIPTION>EX-24
<TEXT>
Document 2 - file: poa_puma.txt

</DOCUMENT>
</SEC-DOCUMENT>