    <SEC-DOCUMENT>0001140361-24-016112-index.html : 20240328
    <SEC-HEADER>0001140361-24-016112.hdr.sgml : 20240328
    <ACCEPTANCE-DATETIME>20240328160405
    ACCESSION NUMBER:		0001140361-24-016112
    CONFORMED SUBMISSION TYPE:	8-K
    PUBLIC DOCUMENT COUNT:		15
    CONFORMED PERIOD OF REPORT:	20240328
    ITEM INFORMATION:		Entry into a Material Definitive Agreement
    ITEM INFORMATION:		Creation of a Direct Financial Obligation or an Obligation under an Off-Balance Sheet Arrangement of a Registrant
    ITEM INFORMATION:		Financial Statements and Exhibits
    FILED AS OF DATE:		20240328
    DATE AS OF CHANGE:		20240328

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			ENTEGRIS INC
    		CENTRAL INDEX KEY:			0001101302
    		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
    		ORGANIZATION NAME:           	08 Industrial Applications and Services
    		IRS NUMBER:				411941551
    		STATE OF INCORPORATION:			DE
    		FISCAL YEAR END:			1231

    	FILING VALUES:
    		FORM TYPE:		8-K
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	001-32598
    		FILM NUMBER:		24798749

    	BUSINESS ADDRESS:
    		STREET 1:		129 CONCORD ROAD
    		CITY:			BILLERICA
    		STATE:			MA
    		ZIP:			01821
    		BUSINESS PHONE:		9784366500

    	MAIL ADDRESS:
    		STREET 1:		129 CONCORD ROAD
    		CITY:			BILLERICA
    		STATE:			MA
    		ZIP:			01821
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>8-K
    <SEQUENCE>1
    <FILENAME>ef20025430_8k.htm
    <DESCRIPTION>8-K
    <TEXT>
    Document 1 - file: ef20025430_8k.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-10.01
    <SEQUENCE>2
    <FILENAME>ef20025430_ex10-01.htm
    <DESCRIPTION>EXHIBIT 10.01
    <TEXT>
    Document 2 - file: ef20025430_ex10-01.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-101.SCH
    <SEQUENCE>3
    <FILENAME>entg-20240328.xsd
    <DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA
    <TEXT>
    Document 3 - file: entg-20240328.xsd

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-101.LAB
    <SEQUENCE>4
    <FILENAME>entg-20240328_lab.xml
    <DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE
    <TEXT>
    Document 4 - file: entg-20240328_lab.xml

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EX-101.PRE
    <SEQUENCE>5
    <FILENAME>entg-20240328_pre.xml
    <DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE
    <TEXT>
    Document 5 - file: entg-20240328_pre.xml

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>6
    <FILENAME>image1.jpg
    <TEXT>
    Document 6 - file: image1.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>XML
    <SEQUENCE>8
    <FILENAME>R1.htm
    <DESCRIPTION>IDEA: XBRL DOCUMENT
    <TEXT>
    Document 8 - file: R1.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>EXCEL
    <SEQUENCE>9
    <FILENAME>Financial_Report.xlsx
    <DESCRIPTION>IDEA: XBRL DOCUMENT
    <TEXT>
    Document 9 - file: Financial_Report.xlsx

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>XML
    <SEQUENCE>10
    <FILENAME>Show.js
    <DESCRIPTION>IDEA: XBRL DOCUMENT
    <TEXT>
    Document 10 - file: Show.js

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>XML
    <SEQUENCE>11
    <FILENAME>report.css
    <DESCRIPTION>IDEA: XBRL DOCUMENT
    <TEXT>
    Document 11 - file: report.css

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>XML
    <SEQUENCE>13
    <FILENAME>FilingSummary.xml
    <DESCRIPTION>IDEA: XBRL DOCUMENT
    <TEXT>
    Document 13 - file: FilingSummary.html

    Document 13 - RAW XML: FilingSummary.xml

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>JSON
    <SEQUENCE>15
    <FILENAME>MetaLinks.json
    <DESCRIPTION>IDEA: XBRL DOCUMENT
    <TEXT>
    Document 15 - file: MetaLinks.json

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>ZIP
    <SEQUENCE>16
    <FILENAME>0001140361-24-016112-xbrl.zip
    <DESCRIPTION>IDEA: XBRL DOCUMENT
    <TEXT>
    Document 16 - file: 0001140361-24-016112-xbrl.zip

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>XML
    <SEQUENCE>18
    <FILENAME>ef20025430_8k_htm.xml
    <DESCRIPTION>IDEA: XBRL DOCUMENT
    <TEXT>
    Document 18 - file: ef20025430_8k_htm.html

    Document 18 - RAW XML: ef20025430_8k_htm.xml

    </DOCUMENT>
    </SEC-DOCUMENT>