EX-21.1 8 entg-12312024xex211.htm EX-21.1
Exhibit 21.1
Subsidiaries of Entegris, Inc.

Name of Subsidiary |  | Jurisdiction
ATMI International Trading Co. Ltd. |  | China
CMC Materials B.V. |  | The Netherlands
CMC Materials Global Corp. |  | Delaware
CMC Korea Co. Ltd |  | South Korea
CMC Materials LLC |  | Delaware
CMC Materials Shanghai Co., Ltd. |  | China
CMC Materials Taiwan Co., Ltd. |  | Taiwan
Entegris Canada Limited |  | Canada
Digital Specialty Chemicals UK Limited |  | United Kingdom
Entegris Asia LLC |  | Delaware
Entegris Asia-U.S. LLC |  | Delaware
Entegris Asia Pte. Ltd. |  | Singapore
Entegris Ecosys LLC |  | Delaware
Entegris GmbH |  | Germany
Entegris GP, Inc. |  | Delaware
Entegris International Holdings II B.V. |  | The Netherlands
Entegris International Holdings VIII LLC |  | The Netherlands
Entegris International Holdings, LLC |  | Delaware
Entegris Ireland Unlimited Company |  | Ireland
Entegris Israel Ltd. |  | Israel
Entegris Japan Co. Ltd. |  | Japan
Entegris Korea Co., Ltd. |  | South Korea
Entegris Malaysia Sdn. Bhd. |  | Malaysia
Entegris (Shanghai) Microelectronics Trading Company Ltd. |  | China
Entegris Pacific Ltd. |  | Delaware
Entegris Pacific Pte., Ltd |  | Singapore
Entegris Pacific II Pte., Ltd |  | Singapore
Entegris Professional Solutions, LLC |  | Delaware
Entegris SAS |  | France
Entegris Singapore Pte. Ltd. |  | Singapore
Entegris Specialty Materials, LLC |  | Delaware
Entegris Taiwan Holdings, LLC |  | Delaware
Entegris Taiwan Technologies Co. Ltd. |  | Taiwan
Hanguk CMC Co., Ltd |  | South Korea
Hanguk Entegris Co., Ltd |  | South Korea
Hangzhou Anow Filtration and Materials Co., Ltd. |  | China
Hangzhou AiNuo Microfiltration Co., Ltd. |  | China
International Test Solutions, LLC |  | Delaware
KMG-Bernuth, Inc. |  | Delaware
KMG-Flowchem, Inc. |  | Delaware
NexPlanar Corporation |  | Delaware
Nihon Entegris G.K. |  | Japan
Poco Graphite, Inc. |  | Delaware