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Revenue (Details) - USD ($) $ in Millions	3 Months Ended
	Mar. 29, 2025	Mar. 30, 2024
Disaggregation of Revenue [Line Items]
Net Sales	$ 773.2	$ 771.0
Fabs
Disaggregation of Revenue [Line Items]
Net Sales	473.1	445.9
Equipment and Engineering
Disaggregation of Revenue [Line Items]
Net Sales	112.9	114.2
Chemical and Materials
Disaggregation of Revenue [Line Items]
Net Sales	78.1	78.8
Semi Distributor and Other
Disaggregation of Revenue [Line Items]
Net Sales	70.0	61.7
Non - Semi
Disaggregation of Revenue [Line Items]
Net Sales	$ 39.1	$ 70.4

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