<SEC-DOCUMENT>0001158015-25-000006.txt : 20250425
<SEC-HEADER>0001158015-25-000006.hdr.sgml : 20250425
<ACCEPTANCE-DATETIME>20250425165833
ACCESSION NUMBER:		0001158015-25-000006
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20250423
FILED AS OF DATE:		20250425
DATE AS OF CHANGE:		20250425

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			PUMA MARY G
		CENTRAL INDEX KEY:			0001158015
		ORGANIZATION NAME:           	

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-32598
		FILM NUMBER:		25875013

	MAIL ADDRESS:	
		STREET 1:		AXCELIS TECHNOLOGIES INC.
		STREET 2:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ENTEGRIS INC
		CENTRAL INDEX KEY:			0001101302
		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		EIN:				411941551
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
		BUSINESS PHONE:		9784366500

	MAIL ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>wk-form4_1745614706.xml
<DESCRIPTION>FORM 4
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0508</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2025-04-23</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0001101302</issuerCik>
        <issuerName>ENTEGRIS INC</issuerName>
        <issuerTradingSymbol>ENTG</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001158015</rptOwnerCik>
            <rptOwnerName>PUMA MARY G</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O ENTEGRIS</rptOwnerStreet1>
            <rptOwnerStreet2>129 CONCORD ROAD</rptOwnerStreet2>
            <rptOwnerCity>BILLERICA</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01821</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <aff10b5One>0</aff10b5One>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <transactionDate>
                <value>2025-04-23</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>2897</value>
                    <footnoteId id="F2"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                    <footnoteId id="F3"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>4104</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <derivativeTable></derivativeTable>

    <footnotes>
        <footnote id="F1">This Form 4 was originally filed on April 25, 2025, but was inadvertently filed under the incorrect reporting person (Entegris, Inc.) and was assigned accession number 0001101302-25-000048. This Form 4 is being filed to report the identified transactions for the correct reporting person (Mary Puma). The prior Form 4 report filed in error should be disregarded.</footnote>
        <footnote id="F2">These Restricted Stock Units vest in full on the earlier of (1) the first anniversary date of the grant, or (2) the date of the Company's 2026 Annual Meeting of Stockholders.</footnote>
        <footnote id="F3">These shares were awarded on April 23, 2025 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2020 Stock Plan, which provides for the award of Restricted Stock Units to independent directors in consideration for services as such.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>/s/ Joseph Colella, Attorney-in-Fact for Mary Puma</signatureName>
        <signatureDate>2025-04-25</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
