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Cover	12 Months Ended
	Dec. 31, 2024
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Entity Information [Line Items]
Entity Registrant Name	Entegris, Inc.
Entity Central Index Key	0001101302

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The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.

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A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.

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Reference 1: http://www.xbrl.org/2003/role/presentationRef
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The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.

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