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Amortizable Intangible Assets and Goodwill (Details) (USD $)	3 Months Ended		9 Months Ended			3 Months Ended	9 Months Ended	12 Months Ended	9 Months Ended	12 Months Ended	9 Months Ended	12 Months Ended	9 Months Ended	12 Months Ended	9 Months Ended	12 Months Ended
	Sep. 30, 2011	Sep. 30, 2010	Sep. 30, 2011	Sep. 30, 2010	Dec. 31, 2010	Sep. 30, 2011 Semiconductor Business Group ("SBG") Patents	Sep. 30, 2011 Patents year	Dec. 31, 2010 Patents year	Sep. 30, 2011 Customer contracts and contractual relationships year	Dec. 31, 2010 Customer contracts and contractual relationships year	Sep. 30, 2011 Existing technology year	Dec. 31, 2010 Existing technology year	Sep. 30, 2011 Intellectual property year	Dec. 31, 2010 Intellectual property year	Sep. 30, 2011 Non-competition agreements year	Dec. 31, 2010 Non-competition agreements year
Components of intangible assets
Gross Carrying Amount	$ 231,327,000		$ 231,327,000		$ 68,917,000		$ 27,643,000	$ 24,433,000	$ 33,550,000	$ 4,050,000	$ 159,350,000	$ 29,950,000	$ 10,384,000	$ 10,384,000	$ 400,000	$ 100,000
Accumulated Amortization	(41,964,000)		(41,964,000)		(27,931,000)		(12,042,000)	(9,361,000)	(5,327,000)	(3,127,000)	(14,078,000)	(4,959,000)	(10,384,000)	(10,384,000)	(133,000)	(100,000)
Net Carrying Amount	189,363,000		189,363,000		40,986,000		15,601,000	15,072,000	28,223,000	923,000	145,272,000	24,991,000			267,000
Minimum useful life (in years)							3	3	1	1	3	3
Maximum useful life (in years)							10	10	10	10	7	7
Useful life (in years)													4	4	3	3
Amortization expense for intangible assets	6,900,000	1,300,000	12,900,000	3,600,000
Fair value of acquired intagible assets						3,200,000
Estimated future amortization expense of intangible assets
2011 (remaining 3 months)			8,384,000
2012			35,167,000
2013			32,101,000
2014			27,960,000
2015			27,309,000
Thereafter			58,442,000
Total			$ 189,363,000