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Restructuring Charges (Details) (USD $)
 3 Months Ended 9 Months Ended
Sep. 30, 2012
Sep. 30, 2011
Sep. 30, 2012
Sep. 30, 2011
Restructuring Cost and Reserve [Line Items]        
Restructuring charges $ 6,622,000 $ 0 $ 6,622,000 $ 0
Restructuring Reserve [Roll Forward]        
Balance at December 31, 2011     0  
Restructuring charges 6,622,000 0 6,622,000 0
Payments     (1,788,000)  
Balance at September 30, 2012 4,834,000   4,834,000  
Employee Severance
        
Restructuring Cost and Reserve [Line Items]        
Restructuring charges     6,622,000  
Restructuring Reserve [Roll Forward]        
Balance at December 31, 2011     0  
Restructuring charges     6,622,000  
Payments     (1,788,000)  
Balance at September 30, 2012 4,834,000   4,834,000  
Other Expense
        
Restructuring Cost and Reserve [Line Items]        
Restructuring charges     0  
Restructuring Reserve [Roll Forward]        
Balance at December 31, 2011     0  
Restructuring charges     0  
Payments     0  
Balance at September 30, 2012 0   0  
Semiconductor Business Group (SBG)
        
Restructuring Cost and Reserve [Line Items]        
Restructuring charges     4,000,000  
Restructuring Reserve [Roll Forward]        
Restructuring charges     4,000,000  
Corporate Support Functions
        
Restructuring Cost and Reserve [Line Items]        
Restructuring charges     2,600,000  
Restructuring Reserve [Roll Forward]        
Restructuring charges     2,600,000  
Minimum
        
Restructuring Cost and Reserve [Line Items]        
Company estimate of the aggregate restructuring cost 6,000,000      
Maximum
        
Restructuring Cost and Reserve [Line Items]        
Company estimate of the aggregate restructuring cost $ 8,000,000