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Segment Information (Details 3) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2022	Mar. 31, 2021
Major customer disclosure
Revenue	$ 99,050	$ 70,382
USA
Major customer disclosure
Revenue	55,684	46,151
Asia-Other
Major customer disclosure
Revenue	17,792	3,574
Singapore
Major customer disclosure
Revenue	14,045	6,338
Taiwan
Major customer disclosure
Revenue	4,960	8,843
Japan
Major customer disclosure
Revenue	3,535	4,588
Europe
Major customer disclosure
Revenue	1,564	446
South Korea
Major customer disclosure
Revenue	1,465	388
Canada
Major customer disclosure
Revenue	$ 5	$ 54

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Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.

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