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Segment Information (Details 3) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2023	Mar. 31, 2022
Major customer disclosure
Revenue	$ 113,762	$ 99,050
USA
Major customer disclosure
Revenue	63,656	55,684
South Korea
Major customer disclosure
Revenue	14,144	1,465
Asia-Other
Major customer disclosure
Revenue	12,704	17,792
Singapore
Major customer disclosure
Revenue	11,328	14,045
Taiwan
Major customer disclosure
Revenue	6,509	4,960
Japan
Major customer disclosure
Revenue	2,415	3,535
Europe
Major customer disclosure
Revenue	1,753	1,564
Canada
Major customer disclosure
Revenue	$ 1,253	$ 5

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Amount, including tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value-added and excise.

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-Section S99
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