<DOCUMENT>
<TYPE>EX-21
<SEQUENCE>2
<FILENAME>ex21.txt
<DESCRIPTION>SUBSIDIARIES OF THE REGISTRANT
<TEXT>

<PAGE>   1
                                         ALPHA INDUSTRIES, INC. AND SUBSIDIARIES



                                   EXHIBIT 21

                         SUBSIDIARIES OF THE REGISTRANT



Name                                         Jurisdiction Of Incorporation
----                                         -----------------------------

Alpha Industries Limited                                England

Alpha Industries GmbH                                   Germany

Alpha Securities Corporation                            Massachusetts

CFP Holding Company, Inc.                               Washington

Trans-Tech, Inc.                                        Maryland

Trans-Tech Europe SARL                                  France

Alpha FSC, Inc.                                         Barbados
</TEXT>
</DOCUMENT>
