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Note 13 - Income Taxes (Details Textual) - USD ($)
$ in Thousands
 12 Months Ended
Dec. 31, 2016
Dec. 31, 2015
Dec. 31, 2014
Deferred Tax Assets, Net, Noncurrent $ 3,337 $ 34,812  
Deferred Tax Liabilities, Net, Noncurrent $ 17,278 $ 4,950  
Effective Income Tax Rate Reconciliation, Percent 36.80% 36.80% 32.40%
Tax Credit Carry Forward State Research and Development $ 17,498    
Tax Credit Carryforward State Manufacturing 3,736    
Unrecognized Tax Benefits, Interest on Income Taxes Expense 272 $ 174 $ 86
Unrecognized Tax Benefits, Income Tax Penalties Expense 425 $ 363 $ 263
Undistributed Earnings of Foreign Subsidiaries 7,551    
CCMP Acquisition [Member]      
Future Tax Benefits, Intangible Assets (Including Goodwill), Amortization 592,000    
Recognition of Tax Benefits, Expected Aggregate Cash Tax Savings, Upon Recognition 231,000    
Recognition of Tax Benefits, Expected Amount of Recognition, Next Twelve Months 122,000    
Recognition of Tax Benefits, Expected Amount of Recognition, in Year Five 102,000    
Recognition of Tax Benefits, Expected Cash Tax Savings, Next Twelve Months 48,000    
Recognition of Tax Benefits, Expected Cash Tax Savings, in Year Five 40,000    
Recognition of Tax Benefits, Expected Amount of Recognition, in Year Two 122,000    
Recognition of Tax Benefits, Expected Amount of Recognition, in Year Three 122,000    
Recognition of Tax Benefits, Expected Amount of Recognition, in Year Four 122,000    
Recognition of Tax Benefits, Expected Cash Tax Savings, in Year Two 48,000    
Recognition of Tax Benefits, Expected Cash Tax Savings, in Year Thre 48,000    
Recognition of Tax Benefits, Expected Cash Tax Savings, in Year Four $ 48,000