# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001193125-13-207610
Filing Date
2013-05-08
Accepted
2013-05-08 16:32:56
Documents
10
Period of Report
2013-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | FORM 10-Q | d508765d10q.htm | 10-Q | 701207
2 | EX-31.1 | d508765dex311.htm | EX-31.1 | 10624
3 | EX-31.2 | d508765dex312.htm | EX-31.2 | 10651
4 | EX-32.1 | d508765dex321.htm | EX-32.1 | 5902
| Complete submission text file | 0001193125-13-207610.txt |  | 7110767

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
5 | XBRL INSTANCE DOCUMENT | mksi-20130331.xml | EX-101.INS | 1339095
6 | XBRL TAXONOMY EXTENSION SCHEMA | mksi-20130331.xsd | EX-101.SCH | 58763
7 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | mksi-20130331_cal.xml | EX-101.CAL | 91792
8 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | mksi-20130331_def.xml | EX-101.DEF | 147303
9 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | mksi-20130331_lab.xml | EX-101.LAB | 406070
10 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | mksi-20130331_pre.xml | EX-101.PRE | 310027

Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

EIN.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 13824972
SIC: 3823 Industrial Instruments For Measurement, Display, and Control