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Restructuring
9 Months Ended
Sep. 30, 2013
Restructuring And Related Activities [Abstract]  
Restructuring
17) Restructuring

In the second and third quarters of 2013, the Company initiated restructuring plans to consolidate a small sales office and a small engineering facility to other MKS facilities. The plans included a small reduction in headcount of approximately 27 people.

The Company recorded restructuring charges of $1,126 and $1,364 for the three and nine months ended September 30, 2013, respectively. The restructuring charges were primarily for severance and other charges associated with the reductions in workforce. The restructuring plans are expected to be completed by December 31, 2013.