EX-21.1 11 d652990dex211.htm EX-21.1

EXHIBIT 21.1

SUBSIDIARIES OF THE REGISTRANT

SUBSIDIARY |  | JURISDICTION OF INCORPORATION
Alter S.r.l. |  | Italy
ASTeX GmbH |  | Germany
MKS (Bermuda) Ltd. |  | Bermuda
MKS Denmark APS |  | Denmark
MKS German Holding GmbH |  | Germany
MKS Instruments (Asia) Ltd. |  | Bermuda
MKS Instruments (China) Company Ltd. |  | China
MKS Instruments Deutschland GmbH |  | Germany
MKS Instruments France S.A.S. |  | France
MKS Instruments Holdings Ltd. |  | United Kingdom
MKS Instruments (Hong Kong) Ltd. |  | Hong Kong
MKS Instruments (Shanghai) Ltd. |  | Shanghai
MKS Instruments (Singapore) Pte. Ltd. |  | Singapore
MKS Instruments U.K. Limited |  | United Kingdom
MKS Japan, Inc. |  | Japan
MKS Korea Ltd. |  | Korea
MKS Luxembourg S.A.R.L. |  | Luxembourg
MKS Spectra Holdings Ltd. |  | United Kingdom
MKS Taiwan Technology Ltd. |  | Taiwan
MKS Technology Limited |  | United Kingdom
MKS Tega Ltd. |  | Israel
MKS Tenta Products Ltd. |  | Israel
MKS Umetrics AB |  | Sweden
Orion Metrology, Inc. |  | California
Plasmart, Inc. |  | Korea
Telvac Engineering Limited |  | United Kingdom
Umetrics, Inc. |  | New Jersey
Umetrics (UK) Ltd. |  | United Kingdom
Yield Dynamics, LLC |  | California