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Business Description - Additional Information (Detail) | 12 Months Ended
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Dec. 31, 2013 Segment Product
Collaboration Arrangement Disclosure [Abstract] |
Number of product groups | 4
Number of reportable segments | 4

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- Details
Name: | mksi_CollaborationArrangementDisclosureAbstract
Namespace Prefix: | mksi_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition Number of product groups. + References No definition available. + Details
Name: | mksi_NumberOfProductGroups
Namespace Prefix: | mksi_
Data Type: | xbrli:integerItemType
Balance Type: | na
Period Type: | duration

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- Definition Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements. + References No definition available. + Details
Name: | us-gaap_NumberOfReportableSegments
Namespace Prefix: | us-gaap_
Data Type: | xbrli:integerItemType
Balance Type: | na
Period Type: | duration