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Debt - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended |
--- | --- | ---
Dec. 31, 2013 Institution | Dec. 31, 2012
Japan Line of Credit [Member] |  |
Debt Instrument [Line Items] |  |
Number of financial institutions for available lines of credit and borrowing arrangements | 2 |
Aggregate borrowings expire and renewed | 3 month intervals |
Total available line of credit | $ 21,878 |
Total borrowings outstanding | 0 | 0
Plasmart Line of Credit [Member] |  |
Debt Instrument [Line Items] |  |
Total borrowings outstanding | $ 0 | $ 0

X
- Definition General renewal period for line of credit facility. + References No definition available. + Details
Name: | mksi_LineOfCreditFacilityRenewalPeriod
Namespace Prefix: | mksi_
Data Type: | us-types:durationStringItemType
Balance Type: | na
Period Type: | duration

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- Definition Number of financial institutions for lines of credit and borrowing arrangements. + References No definition available. + Details
Name: | mksi_NumberOfFinancialInstitutionsThatProvideForAggregateBorrowings
Namespace Prefix: | mksi_
Data Type: | xbrli:integerItemType
Balance Type: | na
Period Type: | instant

X
- Details
Name: | us-gaap_DebtInstrumentLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount borrowed under the credit facility as of the balance sheet date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 02 -Paragraph 19, 22 -Article 5 + Details
Name: | us-gaap_LineOfCreditFacilityAmountOutstanding
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.19(b),22(b)) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 02 -Paragraph 19, 22 -Article 5 + Details
Name: | us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant