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Restructurings
12 Months Ended
Dec. 31, 2013
Restructuring And Related Activities [Abstract]  
Restructurings
22)

Restructurings

In the second and third quarters of 2013, the Company initiated restructuring plans to consolidate a small sales office and a small engineering facility into other MKS facilities. The plans included a small reduction in headcount. The Company recorded restructuring charges of $1,364 during 2013. The restructuring charges were primarily for severance and other charges associated with the reductions in workforce. The restructuring was substantially complete at December 31, 2013.

During the fourth quarter of 2012, the Company implemented a workforce reduction plan as a result of a continued slowdown in the business. The Company reduced its worldwide workforce by 84 people and recorded a restructuring charge of $343.