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Business Description - Additional Information (Detail)	12 Months Ended
	Dec. 31, 2013 Segment Product
Collaboration Arrangement Disclosure [Abstract]
Number of product groups	4
Number of reportable segments	4

X

- Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

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- Definition

Number of product groups.

+ References

No definition available.

+ Details

Name:	mksi_NumberOfProductGroups
Namespace Prefix:	mksi_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements.

+ References

No definition available.

+ Details

Name:	us-gaap_NumberOfReportableSegments
Namespace Prefix:	us-gaap_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration