XML 127 R95.htm IDEA: XBRL DOCUMENT v2.4.0.8

Stock-Based Compensation - Summary of Information with Respect to Options Outstanding and Exercisable (Detail) (USD $) In Thousands, except Share data, unless otherwise specified	12 Months Ended
	Dec. 31, 2013
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Number of Shares Options Outstanding	135,733
Weighted Average Exercise Price	$ 20.88
Exercisable Weighted Average Remaining Contractual Life (In Years)	11 months 12 days
Aggregate Intrinsic Value (In Thousands)	$ 1,227
Minimum [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Share Based Compensation Shares Authorized Under Stock Option Plans Exercise Price Range	$ 14.45
Maximum [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Share Based Compensation Shares Authorized Under Stock Option Plans Exercise Price Range	$ 29.93

X

- Definition

Share based compensation arrangement by share based payment award options outstanding and exercisable aggregate intrinsic value.

+ References

No definition available.

+ Details

Name:	mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingAndExercisableAggregateIntrinsicValue
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

X

- Definition

Share based compensation shares authorized under stock option plans exercise price range.

+ References

No definition available.

+ Details

Name:	mksi_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRange
Namespace Prefix:	mksi_
Data Type:	num:perShareItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Share based compensation shares authorized under stock option plans exercise price range number of outstanding and exercisable options.

+ References

No definition available.

+ Details

Name:	mksi_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingAndExercisableOptions
Namespace Prefix:	mksi_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	instant

X

- Definition

Share based compensation shares authorized under stock option plans exercise price range number of outstanding and exercisable options weighted average remaining contractual term.

+ References

No definition available.

+ Details

Name:	mksi_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeNumberOfOutstandingAndExercisableOptionsWeightedAverageRemainingContractualTerm
Namespace Prefix:	mksi_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Share based compensation shares authorized under stock option plans exercise price range outstanding options and exercisable weighted average exercise price.

+ References

No definition available.

+ Details

Name:	mksi_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsAndExercisableWeightedAverageExercisePrice
Namespace Prefix:	mksi_
Data Type:	num:perShareItemType
Balance Type:	na
Period Type:	instant

X

- Details

Name:	us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration