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Acquisitions - Additional Information (Detail) (Granville-Phillips [Member], USD $) In Thousands, unless otherwise specified | 12 Months Ended |
--- | --- | ---
Dec. 31, 2013 | Mar. 18, 2014
Granville-Phillips [Member] |  |
Business Acquisition [Line Items] |  |
Pending acquisition purchase price |  | $ 87,000
Market sales of an acquiree | $ 30,000 |

X
- Definition Purchase Price Of Pending Acquisition + References No definition available. + Details
Name: | mksi_PurchasePriceOfPendingAcquisition
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Details
Name: | us-gaap_BusinessAcquisitionLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Total revenue reported by the acquired entity for its previous full fiscal year before the business acquisition. + References No definition available. + Details
Name: | us-gaap_BusinessAcquisitionRevenueReportedByAcquiredEntityForLastAnnualPeriod
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration