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Acquisitions
 3 Months Ended
Mar. 31, 2014
Business Combinations [Abstract]  
Acquisitions
7)   Acquisitions

Granville-Phillips

On March 18, 2014, the Company announced an agreement to purchase the assets of Granville-Phillips, a division of Brooks Automation, Inc., for $87,000 in cash. Granville-Phillips is a leading global provider of vacuum measurement and control instruments to the semiconductor, thin film and general industrial markets with sales of approximately $30,000 in 2013. The acquisition aligns with the Company’s current strategy to grow its semiconductor business, while diversifying into other high growth advanced markets. Presuming regulatory approvals and other customary closing conditions are met, the acquisition is expected to close in the second quarter of 2014.