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Acquisitions - Additional Information (Detail) (Granville-Phillips [Member], USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2013	Mar. 18, 2014
Granville-Phillips [Member]
Business Acquisition [Line Items]
Pending acquisition purchase price		$ 87,000
Market sales of an acquiree	$ 30,000

X

- Definition

Purchase Price Of Pending Acquisition

+ References

No definition available.

+ Details

Name:	mksi_PurchasePriceOfPendingAcquisition
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

X

- Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Total revenue reported by the acquired entity for its previous full fiscal year before the business acquisition.

+ References

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionRevenueReportedByAcquiredEntityForLastAnnualPeriod
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration