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Debt - Additional Information (Detail) (Japan [Member], Line of Credit [Member], USD $) In Thousands, unless otherwise specified	6 Months Ended
	Jun. 30, 2014 Institution	Dec. 31, 2013
Japan [Member] | Line of Credit [Member]
Debt Instrument [Line Items]
Number of financial institutions for available lines of credit and borrowing arrangements	2
Aggregate borrowings expire and renewed	3 month intervals
Total available line of credit	$ 22,609
Total borrowings outstanding	$ 0	$ 0

X

- Definition

General renewal period for line of credit facility.

+ References

No definition available.

+ Details

Name:	mksi_LineOfCreditFacilityRenewalPeriod
Namespace Prefix:	mksi_
Data Type:	us-types:durationStringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Number of financial institutions for lines of credit and borrowing arrangements.

+ References

No definition available.

+ Details

Name:	mksi_NumberOfFinancialInstitutionsThatProvideForAggregateBorrowings
Namespace Prefix:	mksi_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	instant

X

- Details

Name:	us-gaap_DebtInstrumentLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Amount borrowed under the credit facility as of the balance sheet date.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 02

-Paragraph 19, 22

-Article 5

+ Details

Name:	us-gaap_LineOfCreditFacilityAmountOutstanding
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

X

- Definition

Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 210

-SubTopic 10

-Section S99

-Paragraph 1

-Subparagraph (SX 210.5-02.19(b),22(b))

-URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682



Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 02

-Paragraph 19, 22

-Article 5

+ Details

Name:	us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant