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Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Capital Expenditures, Depreciation and Amortization Expense and Segment Assets by Reportable Segment (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended
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Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012
Segment Reporting Information [Line Items] |  |  |
Capital expenditures | $ 13,183 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment | $ 12,410 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment | $ 17,705 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment
Depreciation and amortization | 20,514 us-gaap_DepreciationAndAmortization | 17,102 us-gaap_DepreciationAndAmortization | 14,442 us-gaap_DepreciationAndAmortization
Accounts receivable | 106,362 us-gaap_AccountsReceivableNetCurrent | 116,744 us-gaap_AccountsReceivableNetCurrent |
Inventory | 155,169 us-gaap_InventoryNet | 142,727 us-gaap_InventoryNet |
Total segment assets | 261,531 mksi_SegmentAssets | 259,471 mksi_SegmentAssets |
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member] |  |  |
Segment Reporting Information [Line Items] |  |  |
Capital expenditures | 8,634 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 8,729 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 11,817 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember
Depreciation and amortization | 15,119 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 11,836 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 9,594 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember
Accounts receivable | 15,296 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 20,767 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember |
Inventory | 128,345 us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 117,822 us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember |
Total segment assets | 143,641 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember | 138,589 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember |
Operating Segments [Member] | Analytical Solutions Group [Member] |  |  |
Segment Reporting Information [Line Items] |  |  |
Capital expenditures | 1,763 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember | 513 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember | 1,228 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember
Depreciation and amortization | 1,101 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember | 1,252 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember | 1,176 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember
Accounts receivable | 5,335 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember | 5,603 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember |
Inventory | 3,915 us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember | 4,391 us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember |
Total segment assets | 9,250 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember | 9,994 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember |
Operating Segments [Member] | Europe Region Sales & Service [Member] |  |  |
Segment Reporting Information [Line Items] |  |  |
Capital expenditures | 183 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember | 250 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember | 132 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember
Depreciation and amortization | 488 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember | 348 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember | 326 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember
Accounts receivable | 6,503 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember | 6,538 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember |
Inventory | 3,241 us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember | 4,254 us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember |
Total segment assets | 9,744 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember | 10,792 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember |
Operating Segments [Member] | Asia Region Sales & Service Operations [Member] |  |  |
Segment Reporting Information [Line Items] |  |  |
Capital expenditures | 690 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember | 857 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember | 886 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember
Depreciation and amortization | 1,241 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember | 1,177 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember | 1,711 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember
Accounts receivable | 39,046 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember | 44,207 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember |
Inventory | 24,619 us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember | 25,094 us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember |
Total segment assets | 63,665 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember | 69,301 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember |
Corporate, Eliminations and Other [Member] |  |  |
Segment Reporting Information [Line Items] |  |  |
Capital expenditures | 1,913 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember | 2,061 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember | 3,642 us-gaap_PaymentsToAcquirePropertyPlantAndEquipment / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember
Depreciation and amortization | 2,565 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember | 2,489 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember | 1,635 us-gaap_DepreciationAndAmortization / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember
Accounts receivable | 40,182 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember | 39,629 us-gaap_AccountsReceivableNetCurrent / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember |
Inventory | (4,951)us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember | (8,834)us-gaap_InventoryNet / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember |
Total segment assets | $ 35,231 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember | $ 30,795 mksi_SegmentAssets / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember |

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