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v2.4.1.9

Income Taxes - Significant Components of Deferred Tax Assets and Deferred Tax Liabilities (Detail) (USD $) In Thousands, unless otherwise specified | Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012
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Deferred tax assets: |  |  |
Loss carry-forwards and credits | $ 30,523 us-gaap_DeferredTaxAssetsOperatingLossCarryforwards | $ 28,138 us-gaap_DeferredTaxAssetsOperatingLossCarryforwards |
Inventory and warranty reserves | 15,015 mksi_DeferredTaxAssetsInventoryAndWarrantyReserves | 10,890 mksi_DeferredTaxAssetsInventoryAndWarrantyReserves |
Accounts receivable and other accruals | 2,726 mksi_DeferredTaxAssetsAccountsReceivableAndOtherAccruals | 2,615 mksi_DeferredTaxAssetsAccountsReceivableAndOtherAccruals |
Stock-based compensation | 3,255 us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost | 3,581 us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost |
Executive supplemental retirement benefits | 3,321 us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeBenefits | 8,026 us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeBenefits |
Other |  | 63 us-gaap_DeferredTaxAssetsOther |
Total deferred tax assets | 54,840 us-gaap_DeferredTaxAssetsGross | 53,313 us-gaap_DeferredTaxAssetsGross |
Deferred tax liabilities: |  |  |
Acquired intangible assets | (2,833)us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets | (2,782)us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets |
Depreciation and amortization | (6,537)mksi_DeferredTaxLiabilitiesDepreciationAndAmortization | (5,085)mksi_DeferredTaxLiabilitiesDepreciationAndAmortization |
Other | (2,002)us-gaap_DeferredTaxLiabilitiesOther | (1,202)us-gaap_DeferredTaxLiabilitiesOther |
Total deferred tax liabilities | (11,372)us-gaap_DeferredTaxLiabilities | (9,069)us-gaap_DeferredTaxLiabilities |
Valuation allowance | (26,763)us-gaap_DeferredTaxAssetsValuationAllowance | (27,102)us-gaap_DeferredTaxAssetsValuationAllowance | (27,497)us-gaap_DeferredTaxAssetsValuationAllowance
Net deferred tax assets | $ 16,705 us-gaap_DeferredTaxAssetsLiabilitiesNet | $ 17,142 us-gaap_DeferredTaxAssetsLiabilitiesNet |

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- Definition The tax effect as of the balance sheet date of the amount of the estimated future tax deductions arising from employee benefit costs not otherwise specified in the taxonomy, which can only be deducted for tax purposes when actual costs are incurred, and which can only be realized if sufficient tax-basis income is generated in future periods to enable the deduction to be taken. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 50 -Paragraph 6 -URI http://asc.fasb.org/extlink&oid=6907707&loc=d3e32621-109319 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 50 -Paragraph 8 -URI http://asc.fasb.org/extlink&oid=6907707&loc=d3e32632-109319 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 25 -Paragraph 20 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=29652012&loc=d3e28680-109314 + Details
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