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Acquisitions - Summary of Estimated Fair Value of Assets Acquired and Liabilities Assumed (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended | 0 Months Ended | 1 Months Ended | 0 Months Ended |  |
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Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012 | Mar. 12, 2013 | Jun. 30, 2013 | Aug. 29, 2012 | Jun. 30, 2014 | May 30, 2014
Business Acquisition [Line Items] |  |  |  |  |  |  |  |
Goodwill | $ 192,381 us-gaap_Goodwill | $ 150,909 us-gaap_Goodwill | $ 150,733 us-gaap_Goodwill |  |  |  |  |
Total purchase price, net of cash acquired | 86,950 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired | 2,326 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired | 22,607 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired |  |  |  |  |
Granville-Phillips [Member] |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |
Inventory |  |  |  |  |  |  |  | 6,223 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedInventory / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Property and equipment |  |  |  |  |  |  |  | 299 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Intangible assets |  |  |  |  |  |  |  | 38,850 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Goodwill |  |  |  |  |  |  | 41,612 us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember | 41,612 us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Other assets |  |  |  |  |  |  |  | 191 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedOtherNoncurrentAssets / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Warranty liability |  |  |  |  |  |  |  | (175)mksi_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedWarrantLiability / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Total purchase price |  |  |  |  |  |  |  | 87,000 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Alter S.r.l [Member] |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |
Current assets |  |  |  | 1,053 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssets / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Property and equipment |  |  |  | 211 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Intangible assets |  |  |  | 2,806 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Goodwill |  |  |  | 381 us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Other assets |  |  |  | 67 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedOtherNoncurrentAssets / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Total assets acquired |  |  |  | 4,518 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Debt (Note 15) |  |  |  | 770 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesLongTermDebt / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Deferred taxes and other liabilities |  |  |  | 1,301 mksi_BusinessAcquisitionPurchasePriceAllocationDeferredIncomeTaxesAndOtherLiability / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Total liabilities assumed |  |  |  | 2,071 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Total purchase price |  |  |  | 2,447 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Cash acquired |  |  |  | (21)us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCashAndEquivalents / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Total purchase price, net of cash acquired |  |  |  | 2,426 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember | 2,058 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |
Plasmart, Inc. [Member] |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |
Current assets |  |  |  |  |  | 5,536 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentAssets / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Property and equipment |  |  |  |  |  | 3,565 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedPropertyPlantAndEquipment / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Intangible assets |  |  |  |  |  | 10,745 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedIntangibles / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Goodwill |  |  |  |  |  | 9,989 us-gaap_Goodwill / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Other assets |  |  |  |  |  | 554 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedOtherNoncurrentAssets / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Total assets acquired |  |  |  |  |  | 30,389 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedAssets / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Debt (Note 15) |  |  |  |  |  | 4,561 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilitiesLongTermDebt / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Deferred taxes and other liabilities |  |  |  |  |  | 3,128 mksi_BusinessAcquisitionPurchasePriceAllocationDeferredIncomeTaxesAndOtherLiability / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Total liabilities assumed |  |  |  |  |  | 7,689 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Total purchase price |  |  |  |  |  | 22,700 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Cash acquired |  |  |  |  |  | (93)us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCashAndEquivalents / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Total purchase price, net of cash acquired |  |  |  |  |  | $ 22,607 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |

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