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Derivatives - Summary of Primary Net Hedging Positions and Corresponding Fair Values (Detail) (USD $) In Thousands, unless otherwise specified | Dec. 31, 2014 | Dec. 31, 2013
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Derivative [Line Items] |  |
Currency Hedged (Buy/Sell), Gross Notional Value, Net | $ 28,650 us-gaap_DerivativeAssetNotionalAmount | $ 21,018 us-gaap_DerivativeAssetNotionalAmount
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net | 1,966 us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet | 264 us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet
Forward Exchange Contracts [Member] | U.S. Dollar/Japanese Yen [Member] |  |
Derivative [Line Items] |  |
Currency Hedged (Buy/Sell), Gross Notional Value, Net | 8,035 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarJapaneseYenMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember | 7,191 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarJapaneseYenMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net | 1,107 us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarJapaneseYenMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember | 920 us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarJapaneseYenMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Forward Exchange Contracts [Member] | U.S. Dollar/South Korean Won [Member] |  |
Derivative [Line Items] |  |
Currency Hedged (Buy/Sell), Gross Notional Value, Net | 12,512 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarKoreanWonMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember | 9,254 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarKoreanWonMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net | 372 us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarKoreanWonMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember | (521)us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarKoreanWonMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Forward Exchange Contracts [Member] | U.S. Dollar/Euro [Member] |  |
Derivative [Line Items] |  |
Currency Hedged (Buy/Sell), Gross Notional Value, Net | 2,060 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarEuroMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember | 2,806 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarEuroMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net | 185 us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarEuroMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember | (85)us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarEuroMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Forward Exchange Contracts [Member] | U.S. Dollar/U.K. Pound Sterling [Member] |  |
Derivative [Line Items] |  |
Currency Hedged (Buy/Sell), Gross Notional Value, Net | 1,308 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_UsDollarUkPoundMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember | 1,767 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_UsDollarUkPoundMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net | 70 us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_UsDollarUkPoundMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember | (50)us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_UsDollarUkPoundMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember
Forward Exchange Contracts [Member] | U.S. Dollar/Taiwan Dollar [Member] |  |
Derivative [Line Items] |  |
Currency Hedged (Buy/Sell), Gross Notional Value, Net | 4,735 us-gaap_DerivativeAssetNotionalAmount / us-gaap_DerivativeByNatureAxis = mksi_USDollarTaiwaneseDollarsMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember |
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net | $ 232 us-gaap_ForeignCurrencyCashFlowHedgeDerivativeAtFairValueNet / us-gaap_DerivativeByNatureAxis = mksi_USDollarTaiwaneseDollarsMember / us-gaap_DerivativeInstrumentRiskAxis = us-gaap_ForeignExchangeForwardMember |

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- Definition Nominal or face amount used to calculate payments on the derivative asset. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 815 -SubTopic 10 -Section 50 -Paragraph 1B -URI http://asc.fasb.org/extlink&oid=35706170&loc=SL5580258-113959 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 815 -SubTopic 10 -Section 50 -Paragraph 1A -Subparagraph (d) -URI http://asc.fasb.org/extlink&oid=35706170&loc=SL5579245-113959 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Notional Amount -URI http://asc.fasb.org/extlink&oid=6519104 + Details
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- Definition Fair value as of the balance sheet date of all foreign currency derivatives designated as cash flow hedging instruments. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 815 -SubTopic 10 -Section 50 -Paragraph 4B -Subparagraph (a),(b),(c)(1) -URI http://asc.fasb.org/extlink&oid=35706170&loc=SL5624163-113959 + Details
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