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Employee Benefit Plans - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended | 1 Months Ended
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Dec. 31, 2014 Plan Age | Dec. 31, 2013 | Dec. 31, 2012 | Jun. 30, 2014
Defined Benefit Plan Disclosure [Line Items] |  |  |  |
Employee contribution to Company's profit sharing plan percentage | 1.00%mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent |  |  |
Employee contribution to Company's profit sharing plan percentage | 50.00%us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent |  |  |
Minimum age limit for specified additional amount | 50 mksi_MinimumAgeLimitForSpecifiedAdditionalAmount |  |  |
Employers contribution percentage limit | 50.00%us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch |  |  |
Employees maximum contribution as a percentage of salary | 6.00%us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent |  |  |
Company's contributions | $ 2,484 us-gaap_PensionAndOtherPostretirementBenefitContributions | $ 2,334 us-gaap_PensionAndOtherPostretirementBenefitContributions | $ 2,245 us-gaap_PensionAndOtherPostretirementBenefitContributions |
Foreign defined benefit plan | 1 mksi_NumberOfForeignDefinedBenefitPensionPlans |  |  |
Bonus expense | 14,434 mksi_EmployeePerformanceAwardBonusExpense | 16,006 mksi_EmployeePerformanceAwardBonusExpense | 8,855 mksi_EmployeePerformanceAwardBonusExpense |
Supplemental retirement benefits cost | 2,258 mksi_SupplementalRetirementBenefitsCost | 4,988 mksi_SupplementalRetirementBenefitsCost | 3,454 mksi_SupplementalRetirementBenefitsCost |
Accumulated benefit obligation | 8,941 mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligation | 21,403 mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligation |  |
Chief Executive Officer [Member] |  |  |  |
Defined Benefit Plan Disclosure [Line Items] |  |  |  |
Payment related to accrued supplemental retirement benefits |  |  |  | 13,921 us-gaap_DefinedBenefitPlanBenefitsPaid / us-gaap_TitleOfIndividualAxis = us-gaap_ChiefExecutiveOfficerMember
Other Current Liabilities [Member] |  |  |  |
Defined Benefit Plan Disclosure [Line Items] |  |  |  |
Accumulated benefit obligation |  | 14,517 mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligation / us-gaap_BalanceSheetLocationAxis = us-gaap_OtherCurrentLiabilitiesMember |  |
Other Noncurrent Liabilities [Member] |  |  |  |
Defined Benefit Plan Disclosure [Line Items] |  |  |  |
Accumulated benefit obligation |  | $ 6,886 mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligation / us-gaap_BalanceSheetLocationAxis = us-gaap_OtherNoncurrentLiabilitiesMember |  |

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- Definition Defined Contribution Plan Minimum Annual Contributions Per Employee Percent + References No definition available. + Details
Name: | mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

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- Definition Employee bonus expense (includes bonus expense and performance awards). + References No definition available. + Details
Name: | mksi_EmployeePerformanceAwardBonusExpense
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition Minimum age limit for specified additional amount. + References No definition available. + Details
Name: | mksi_MinimumAgeLimitForSpecifiedAdditionalAmount
Namespace Prefix: | mksi_
Data Type: | xbrli:integerItemType
Balance Type: | na
Period Type: | duration

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- Definition Number of foreign defined benefit pension plans. + References No definition available. + Details
Name: | mksi_NumberOfForeignDefinedBenefitPensionPlans
Namespace Prefix: | mksi_
Data Type: | xbrli:integerItemType
Balance Type: | na
Period Type: | duration

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- Definition Supplemental retirement benefits accumulated benefit obligation. + References No definition available. + Details
Name: | mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligation
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

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- Definition Supplemental retirement benefits cost. + References No definition available. + Details
Name: | mksi_SupplementalRetirementBenefitsCost
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition The amount of payments made for which participants are entitled under a pension plan, including pension benefits, death benefits, and benefits due on termination of employment. Also includes payments made under a postretirement benefit plan, including prescription drug benefits, health care benefits, life insurance benefits, and legal, educational and advisory services. This item represents a periodic decrease to the plan obligations and a decrease to plan assets. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Postretirement Benefits -URI http://asc.fasb.org/extlink&oid=6521376 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 715 -SubTopic 60 -Section 50 -Paragraph 4 -URI http://asc.fasb.org/extlink&oid=6414203&loc=d3e39716-114964 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 715 -SubTopic 30 -Glossary Benefits -URI http://asc.fasb.org/extlink&oid=6506267 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 715 -SubTopic 60 -Glossary Benefits -URI http://asc.fasb.org/extlink&oid=6506309 Reference 5: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 715 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (a)(6) -URI http://asc.fasb.org/extlink&oid=35743120&loc=d3e1928-114920 Reference 6: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 715 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (b)(5) -URI http://asc.fasb.org/extlink&oid=35743120&loc=d3e1928-114920 + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Details
Name: | us-gaap_DefinedBenefitPlanDisclosureLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan. + References No definition available. + Details
Name: | us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent
Namespace Prefix: | us-gaap_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

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- Definition Percentage employer matches of the employee's percentage contribution matched. + References No definition available. + Details
Name: | us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch
Namespace Prefix: | us-gaap_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

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- Definition Maximum percentage of employee gross pay the employee may contribute to a defined contribution plan. + References No definition available. + Details
Name: | us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent
Namespace Prefix: | us-gaap_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

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- Definition The amount of cash or cash equivalents contributed during the reporting period by the entity to fund its pension plans and its non-pension postretirement benefit plans. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 25 -Subparagraph (g) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3536-108585 + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- Details
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Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

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- Details
Name: | us-gaap_BalanceSheetLocationAxis=us-gaap_OtherNoncurrentLiabilitiesMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

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- Details
Name: | us-gaap_TitleOfIndividualAxis=us-gaap_ChiefExecutiveOfficerMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |