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Acquisitions - Allocation of Acquired Intangible Assets and Related Estimates of Useful Lives (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended | 0 Months Ended | 12 Months Ended | 0 Months Ended
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Dec. 31, 2014 | May 30, 2014 | Mar. 12, 2013 | Dec. 31, 2013 | Aug. 29, 2012 | May 31, 2013
Minimum [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Estimated useful life of finite lived intangible assets | 2 years |  |  |  |  |
Maximum [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Estimated useful life of finite lived intangible assets | 10 years |  |  |  |  |
Granville-Phillips [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price | 38,850 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember | $ 38,850 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember |  |  |  |
Alter S.r.l [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price |  |  | 2,806 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember | 268 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |
Plasmart, Inc. [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price |  |  |  |  | 10,745 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |
Customer Relationships [Member] | Granville-Phillips [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price | 21,250 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember | 21,250 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember |  |  |  |
Estimated useful life of finite lived intangible assets |  | 7 years |  |  |  |
Customer Relationships [Member] | Plasmart, Inc. [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price |  |  |  |  | 5,381 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember |
Estimated useful life of finite lived intangible assets |  |  |  |  | 10 years |
Trademark and Trade Names [Member] | Granville-Phillips [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price | 1,900 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember | 1,900 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember |  |  |  |
Estimated useful life of finite lived intangible assets |  | 12 years |  |  |  |
Trademark and Trade Names [Member] | Alter S.r.l [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price |  |  | 598 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember |  |  |
Estimated useful life of finite lived intangible assets |  |  |  |  |  | 3 years
Developed Technology [Member] | Granville-Phillips [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price |  | 15,700 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_DevelopedTechnologyRightsMember |  |  |  |
Developed Technology [Member] | Granville-Phillips [Member] | Minimum [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Estimated useful life of finite lived intangible assets |  | 9 years |  |  |  |
Developed Technology [Member] | Granville-Phillips [Member] | Maximum [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Estimated useful life of finite lived intangible assets |  | 12 years |  |  |  |
Developed Technology [Member] | Alter S.r.l [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price |  |  | 2,208 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_DevelopedTechnologyRightsMember |  |  |
Estimated useful life of finite lived intangible assets |  |  |  |  |  | 9 years
Developed Technology [Member] | Plasmart, Inc. [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price |  |  |  |  | 5,029 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_DevelopedTechnologyRightsMember |
Developed Technology [Member] | Plasmart, Inc. [Member] | Minimum [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Estimated useful life of finite lived intangible assets |  |  |  |  | 7 years 6 months |
Developed Technology [Member] | Plasmart, Inc. [Member] | Maximum [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Estimated useful life of finite lived intangible assets |  |  |  |  | 9 years 6 months |
Trade Mark and Trade Names [Member] | Plasmart, Inc. [Member] |  |  |  |  |  |
Acquired Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets, purchase price |  |  |  |  | $ 335 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TradeNamesMember |
Estimated useful life of finite lived intangible assets |  |  |  |  | 7 years |

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