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Restructurings - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended | 3 Months Ended
--- | --- | ---
Dec. 31, 2014 People | Dec. 31, 2013 | Dec. 31, 2012 People | Sep. 30, 2014
Restructuring Cost and Reserve [Line Items] |  |  |  |
Restructuring charges | $ 2,464 us-gaap_RestructuringCharges | $ 1,364 us-gaap_RestructuringCharges | $ 343 us-gaap_RestructuringCharges |
Approximate number of workforce reduction from the company's headcount | 131 us-gaap_RestructuringAndRelatedCostNumberOfPositionsEliminated |  | 84 us-gaap_RestructuringAndRelatedCostNumberOfPositionsEliminated |
COLORADO |  |  |  |
Restructuring Cost and Reserve [Line Items] |  |  |  |
Number of facilities closing | 1 mksi_NumberOfClosedFacilities / us-gaap_StatementGeographicalAxis = stpr_CO |  |  |
Proceeds from sale of building, net of commissions |  |  |  | $ 1,316 mksi_ProceedsFromSaleOfBuildingNetOfCommissions / us-gaap_StatementGeographicalAxis = stpr_CO

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- Definition Proceeds from sale of building net of commissions. + References No definition available. + Details
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- Definition The number of positions eliminated during the period as a result of restructuring activities. + References No definition available. + Details
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- Definition Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 28 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3602-108585 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section 50 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=6394359&loc=d3e17939-110869 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SAB TOPIC 5.P.4(b)) -URI http://asc.fasb.org/extlink&oid=27011515&loc=d3e140904-122747 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 420 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SAB TOPIC 5.P.3) -URI http://asc.fasb.org/extlink&oid=27011515&loc=d3e140864-122747 Reference 5: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Staff Accounting Bulletin (SAB) -Number Topic 5 -Section P -Subsection 3, 4 + Details
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