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Summary of Significant Accounting Policies - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended
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Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Minimum period of company's research and development projects | 3 months |  |
Maximum period of company's research and development projects | 30 months |  |
Vesting period | 3 years |  |
Maximum maturity period of liquid investments | 3 months |  |
Amortization period of leasehold improvements | shorter of the lease term or the estimated useful life of the leased asset |  |
Increase (decrease) in valuation allowance on state tax credit carryforwards | $ (339)us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount | $ (395)us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount | $ 1,022 us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount
Valuation allowance | 26,763 us-gaap_DeferredTaxAssetsValuationAllowance | 27,102 us-gaap_DeferredTaxAssetsValuationAllowance | 27,497 us-gaap_DeferredTaxAssetsValuationAllowance
Minimum percentage of recognition of tax benefits from uncertain tax positions | 50.00%mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition |  |
Customer Concentration Risk [Member] | Accounts Receivable [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Number of customers comprising of Accounts Receivable | 2 mksi_NumberOfCustomerRelatedToCreditConcentrationRiskOfNetSales / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_AccountsReceivableMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember |  |
Customer Concentration Risk [Member] | Customer A [Member] | Sales Revenue, Net [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Concentration risk, percentage | 19.10%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerOneMember | 17.00%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerOneMember | 14.50%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerOneMember
Customer Concentration Risk [Member] | Customer B [Member] | Sales Revenue, Net [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Concentration risk, percentage | 12.90%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerTwoMember | 12.30%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerTwoMember | 10.10%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesRevenueNetMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_CustomerTwoMember
Customer Concentration Risk [Member] | Semiconductor Products [Member] | Sales [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Concentration risk, percentage | 70.00%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_SemiconductorProductsMember | 68.00%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_SemiconductorProductsMember | 62.00%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_SalesMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CustomerConcentrationRiskMember / us-gaap_MajorCustomersAxis = mksi_SemiconductorProductsMember
Selling, General and Administrative Expenses [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Net foreign exchange gains and losses from re-measurement | $ 314 us-gaap_ForeignCurrencyTransactionGainLossRealized / us-gaap_IncomeStatementLocationAxis = us-gaap_SellingGeneralAndAdministrativeExpensesMember | $ 1,937 us-gaap_ForeignCurrencyTransactionGainLossRealized / us-gaap_IncomeStatementLocationAxis = us-gaap_SellingGeneralAndAdministrativeExpensesMember | $ 301 us-gaap_ForeignCurrencyTransactionGainLossRealized / us-gaap_IncomeStatementLocationAxis = us-gaap_SellingGeneralAndAdministrativeExpensesMember
Minimum [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Intangible assets amortized period | 2 years |  |
Minimum [Member] | Credit Concentration Risk [Member] | Accounts Receivable [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Concentration risk, percentage | 10.00%us-gaap_ConcentrationRiskPercentage1 / us-gaap_ConcentrationRiskByBenchmarkAxis = us-gaap_AccountsReceivableMember / us-gaap_ConcentrationRiskByTypeAxis = us-gaap_CreditConcentrationRiskMember / us-gaap_RangeAxis = us-gaap_MinimumMember |  |
Minimum [Member] | Buildings [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Estimated useful lives | 20 years |  |
Minimum [Member] | Machinery and Equipment [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Estimated useful lives | 3 years |  |
Minimum [Member] | Furniture and Fixtures [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Estimated useful lives | 3 years |  |
Minimum [Member] | Office Equipment [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Estimated useful lives | 3 years |  |
Maximum [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Intangible assets amortized period | 10 years |  |
Maximum [Member] | Buildings [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Estimated useful lives | 31 years 6 months |  |
Maximum [Member] | Machinery and Equipment [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Estimated useful lives | 7 years |  |
Maximum [Member] | Furniture and Fixtures [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Estimated useful lives | 7 years |  |
Maximum [Member] | Office Equipment [Member] |  |  |
Schedule Of Significant Accounting Policies [Line Items] |  |  |
Estimated useful lives | 7 years |  |

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