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Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Detail) (USD $) In Thousands, unless otherwise specified | Dec. 31, 2014 | Dec. 31, 2013
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Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Derivatives - currency forward contracts | $ 1,966 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue | $ 920 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
Derivatives - currency forward contracts |  | 656 us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue
Cash and cash equivalents | 167,517 us-gaap_CashAndCashEquivalentsFairValueDisclosure | 234,675 us-gaap_CashAndCashEquivalentsFairValueDisclosure
Short-term investments | 129,594 us-gaap_ShortTermInvestments | 300,715 us-gaap_ShortTermInvestments
Available-for-sale securities | 129,594 us-gaap_AvailableForSaleSecuritiesCurrent | 299,715 us-gaap_AvailableForSaleSecuritiesCurrent
Other current assets | 1,966 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue | 920 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue
Long-term investments | 157,201 us-gaap_AvailableForSaleSecuritiesNoncurrent | 60,405 us-gaap_AvailableForSaleSecuritiesNoncurrent
Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Derivatives - currency forward contracts | 2,110 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 920 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Total assets | 418,828 us-gaap_AssetsFairValueDisclosure / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 410,638 us-gaap_AssetsFairValueDisclosure / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Derivatives - currency forward contracts |  | 656 us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Cash and cash equivalents | 129,923 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 48,598 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Short-term investments | 129,594 us-gaap_ShortTermInvestments / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 300,715 us-gaap_ShortTermInvestments / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Other current assets | 2,110 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 920 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Total current assets | 261,627 mksi_CurrentAssetsFairValueDisclosure / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 350,233 mksi_CurrentAssetsFairValueDisclosure / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Long-term investments | 157,201 us-gaap_AvailableForSaleSecuritiesNoncurrent / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 60,405 us-gaap_AvailableForSaleSecuritiesNoncurrent / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Other current liabilities |  | 656 us-gaap_OtherLiabilitiesFairValueDisclosure / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Total assets | 129,092 us-gaap_AssetsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 39,166 us-gaap_AssetsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Cash and cash equivalents | 129,092 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 38,166 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Short-term investments |  | 1,000 us-gaap_ShortTermInvestments / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Total current assets | 129,092 mksi_CurrentAssetsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 39,166 mksi_CurrentAssetsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Derivatives - currency forward contracts | 2,110 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 920 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Total assets | 289,736 us-gaap_AssetsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 371,472 us-gaap_AssetsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Derivatives - currency forward contracts |  | 656 us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Cash and cash equivalents | 831 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 10,432 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Short-term investments | 129,594 us-gaap_ShortTermInvestments / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 299,715 us-gaap_ShortTermInvestments / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Other current assets | 2,110 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 920 us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Total current assets | 132,535 mksi_CurrentAssetsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 311,067 mksi_CurrentAssetsFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Long-term investments | 157,201 us-gaap_AvailableForSaleSecuritiesNoncurrent / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 60,405 us-gaap_AvailableForSaleSecuritiesNoncurrent / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Other current liabilities |  | 656 us-gaap_OtherLiabilitiesFairValueDisclosure / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Money Market Funds [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents | 129,092 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_MoneyMarketFundsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 38,166 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_MoneyMarketFundsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Money Market Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents | 129,092 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_MoneyMarketFundsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 38,166 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_MoneyMarketFundsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Time Deposits and Certificates of Deposit [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents |  | 7,050 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities | 20,948 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 65,043 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Time Deposits and Certificates of Deposit [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents |  | 7,050 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities | 20,948 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 65,043 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = mksi_CommercialPaperCertificatesOfDepositTimeDepositsAndOtherMoneyMarketInstrumentsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Bankers Acceptance Drafts [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents | 131 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_BankersAcceptanceMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 32 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_BankersAcceptanceMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities | 82 us-gaap_AvailableForSaleSecuritiesCurrent / us-gaap_FairValueByAssetClassAxis = us-gaap_BankersAcceptanceMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 491 us-gaap_AvailableForSaleSecuritiesCurrent / us-gaap_FairValueByAssetClassAxis = us-gaap_BankersAcceptanceMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Bankers Acceptance Drafts [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents | 131 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_BankersAcceptanceMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 32 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_BankersAcceptanceMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities | 82 us-gaap_AvailableForSaleSecuritiesCurrent / us-gaap_FairValueByAssetClassAxis = us-gaap_BankersAcceptanceMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 491 us-gaap_AvailableForSaleSecuritiesCurrent / us-gaap_FairValueByAssetClassAxis = us-gaap_BankersAcceptanceMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Commercial Paper [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents |  | 3,350 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_CommercialPaperMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities |  | 53,434 us-gaap_AvailableForSaleSecuritiesCurrent / us-gaap_FairValueByAssetClassAxis = us-gaap_CommercialPaperMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Commercial Paper [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents |  | 3,350 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = us-gaap_CommercialPaperMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities |  | 53,434 us-gaap_AvailableForSaleSecuritiesCurrent / us-gaap_FairValueByAssetClassAxis = us-gaap_CommercialPaperMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Mutual Funds [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Mutual funds |  | 1,000 us-gaap_TradingSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_EquityFundsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Mutual Funds [Member] | Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Mutual funds |  | 1,000 us-gaap_TradingSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_EquityFundsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel1Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Corporate Obligations [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents | 700 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = mksi_CorporateObligationsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |
Available-for-sale securities |  | 18,351 us-gaap_AvailableForSaleSecuritiesCurrent / us-gaap_FairValueByAssetClassAxis = mksi_CorporateObligationsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities | 88,689 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = mksi_CorporateObligationsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |
Corporate Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Cash and cash equivalents | 700 us-gaap_CashAndCashEquivalentsFairValueDisclosure / us-gaap_FairValueByAssetClassAxis = mksi_CorporateObligationsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |
Available-for-sale securities |  | 18,351 us-gaap_AvailableForSaleSecuritiesCurrent / us-gaap_FairValueByAssetClassAxis = mksi_CorporateObligationsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Available-for-sale securities | 88,689 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = mksi_CorporateObligationsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |
U.S. Agency Obligations [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Available-for-sale securities | 98,049 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_USGovernmentAgenciesDebtSecuritiesMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 222,801 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_USGovernmentAgenciesDebtSecuritiesMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
U.S. Agency Obligations [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Available-for-sale securities | 98,049 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_USGovernmentAgenciesDebtSecuritiesMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember | 222,801 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_USGovernmentAgenciesDebtSecuritiesMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember
Asset Backed Securities [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Available-for-sale securities | 75,674 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_AssetBackedSecuritiesMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |
Asset Backed Securities [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Available-for-sale securities | 75,674 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_AssetBackedSecuritiesMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |
Municipal Bonds [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Available-for-sale securities | 3,353 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_MunicipalBondsMember / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |
Municipal Bonds [Member] | Significant Other Observable Inputs (Level 2) [Member] | Fair Value Measurements, Recurring [Member] |  |
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items] |  |
Available-for-sale securities | $ 3,353 us-gaap_AvailableForSaleSecurities / us-gaap_FairValueByAssetClassAxis = us-gaap_MunicipalBondsMember / us-gaap_FairValueByFairValueHierarchyLevelAxis = us-gaap_FairValueInputsLevel2Member / us-gaap_FairValueByMeasurementFrequencyAxis = us-gaap_FairValueMeasurementsRecurringMember |

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- Definition Current assets fair value disclosure. + References No definition available. + Details
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Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

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- Definition Fair value portion of probable future economic benefits obtained or controlled by an entity as a result of past transactions or events. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 820 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=36462937&loc=d3e19207-110258 + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

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- Definition Amount of investment in debt and equity securities categorized neither as held-to-maturity nor trading. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 25 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=28360136&loc=d3e22054-111558 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 50 -Paragraph 5 -Subparagraph (aa) -URI http://asc.fasb.org/extlink&oid=27724398&loc=d3e27232-111563 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 45 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=6871852&loc=d3e26610-111562 + Details
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- Definition Amount of investment in debt and equity securities categorized neither as trading securities nor held-to-maturity securities and intended be sold or mature one year or operating cycle, if longer. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 25 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=28360136&loc=d3e22054-111558 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 45 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6871852&loc=d3e26626-111562 + Details
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- Definition Investments in debt and equity securities which are categorized neither as held-to-maturity nor trading and which are intended to be sold or mature more than one year from the balance sheet date or operating cycle, if longer. Such securities are reported at fair value; unrealized gains (losses) related to Available-for-sale Securities are excluded from earnings and reported in a separate component of shareholders' equity (other comprehensive income), unless the Available-for-sale security is designated as a hedge or is determined to have had an other than temporary decline in fair value below its amortized cost basis. All or a portion of the unrealized holding gain (loss) of an Available-for-sale security that is designated as being hedged in a fair value hedge is recognized in earnings during the period of the hedge, as are other than temporary declines in fair value below the cost basis for investments in equity securities and debt securities that an entity intends to sell or it is more likely than not that it will be required to sell before the recovery of its amortized cost basis. Other than temporary declines in fair value below the cost basis for debt securities categorized as Available-for-sale that an entity does not intend to sell and for which it is not more likely than not that the entity will be required to sell before the recovery of its amortized cost basis are bifurcated into credit losses and losses related to all other factors. Other than temporary declines in fair value below cost basis related to credit losses are recognized in earnings, and losses related to all other factors are recognized in other comprehensive income. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 320 -SubTopic 10 -Section 45 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6871852&loc=d3e26626-111562 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Available-for-Sale Securities -URI http://asc.fasb.org/extlink&oid=6505594 + Details
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- Definition Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Cash -URI http://asc.fasb.org/extlink&oid=6506951 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Cash Equivalents -URI http://asc.fasb.org/extlink&oid=6507016 + Details
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- Definition Fair value as of the balance sheet date of all foreign currency derivative assets designated as cash flow hedging instruments. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 815 -SubTopic 10 -Section 50 -Paragraph 4B -Subparagraph (c)(1) -URI http://asc.fasb.org/extlink&oid=35706170&loc=SL5624163-113959 + Details
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- Definition Fair value as of the balance sheet date of all foreign currency derivative liabilities designated as cash flow hedging instruments. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 815 -SubTopic 10 -Section 50 -Paragraph 4B -Subparagraph (c)(1) -URI http://asc.fasb.org/extlink&oid=35706170&loc=SL5624163-113959 + Details
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- Definition Investments which are intended to be sold in the short term (usually less than one year or the normal operating cycle, whichever is longer) including trading securities, available-for-sale securities, held-to-maturity securities, and other short-term investments not otherwise listed in the existing taxonomy. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.2) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 03 -Paragraph 1 -Subparagraph g -Article 7 + Details
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