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Business Segment, Geographic Area, Product and Significant Customer Information - Reconciliation of Segment Assets to Consolidated Total Assets (Detail) (USD $) In Thousands, unless otherwise specified | Dec. 31, 2014 | Dec. 31, 2013
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Segment Reporting Information [Line Items] |  |
Total assets | $ 1,224,044 us-gaap_Assets | $ 1,213,018 us-gaap_Assets
Other current assets | 27,512 us-gaap_OtherAssetsCurrent | 16,715 us-gaap_OtherAssetsCurrent
Property, plant and equipment, net | 72,776 us-gaap_PropertyPlantAndEquipmentNet | 77,536 us-gaap_PropertyPlantAndEquipmentNet
Other assets | 17,206 us-gaap_OtherAssetsNoncurrent | 31,847 us-gaap_OtherAssetsNoncurrent
Reconciliation of Segment Assets to Consolidated Assets [Member] |  |
Segment Reporting Information [Line Items] |  |
Total assets | 261,531 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember | 259,471 us-gaap_Assets / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Cash and cash equivalents and investments | 592,232 us-gaap_InvestmentsAndCash / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember | 650,022 us-gaap_InvestmentsAndCash / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Other current assets | 41,529 us-gaap_OtherAssetsCurrent / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember | 30,143 us-gaap_OtherAssetsCurrent / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Property, plant and equipment, net | 72,776 us-gaap_PropertyPlantAndEquipmentNet / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember | 77,536 us-gaap_PropertyPlantAndEquipmentNet / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Goodwill and intangible assets, net | 238,770 us-gaap_IntangibleAssetsNetIncludingGoodwill / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember | 163,999 us-gaap_IntangibleAssetsNetIncludingGoodwill / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Other assets | $ 17,206 us-gaap_OtherAssetsNoncurrent / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember | $ 31,847 us-gaap_OtherAssetsNoncurrent / us-gaap_StatementBusinessSegmentsAxis = mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember

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- Definition Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.18) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 03 -Paragraph 12 -Article 7 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 02 -Paragraph 18 -Article 5 + Details
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- Definition Carrying amount of finite-lived intangible assets, indefinite-lived intangible assets and goodwill. Goodwill is an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Intangible assets are assets, not including financial assets, lacking physical substance. + References No definition available. + Details
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