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Goodwill and Intangible Assets - Intangible Assets (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended
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Dec. 31, 2014 | Dec. 31, 2013
Finite-Lived Intangible Assets [Line Items] |  |
Intangible assets, Gross | $ 163,737 us-gaap_FiniteLivedIntangibleAssetsGross | $ 124,887 us-gaap_FiniteLivedIntangibleAssetsGross
Accumulated Amortization | (117,799)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization | (112,854)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization
Foreign Currency Translation | 451 us-gaap_FiniteLivedIntangibleAssetsTranslationAdjustments | 1,057 us-gaap_FiniteLivedIntangibleAssetsTranslationAdjustments
Intangible assets, net | 46,389 us-gaap_FiniteLivedIntangibleAssetsNet | 13,090 us-gaap_FiniteLivedIntangibleAssetsNet
Completed Technology [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Intangible assets, Gross | 100,380 us-gaap_FiniteLivedIntangibleAssetsGross / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember | 84,680 us-gaap_FiniteLivedIntangibleAssetsGross / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Accumulated Amortization | (79,875)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember | (78,072)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Foreign Currency Translation | 135 us-gaap_FiniteLivedIntangibleAssetsTranslationAdjustments / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember | 519 us-gaap_FiniteLivedIntangibleAssetsTranslationAdjustments / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Intangible assets, net | 20,640 us-gaap_FiniteLivedIntangibleAssetsNet / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember | 7,127 us-gaap_FiniteLivedIntangibleAssetsNet / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember
Customer Relationships [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Intangible assets, Gross | 35,821 us-gaap_FiniteLivedIntangibleAssetsGross / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember | 14,571 us-gaap_FiniteLivedIntangibleAssetsGross / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Accumulated Amortization | (12,634)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember | (9,831)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Foreign Currency Translation | 280 us-gaap_FiniteLivedIntangibleAssetsTranslationAdjustments / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember | 454 us-gaap_FiniteLivedIntangibleAssetsTranslationAdjustments / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Intangible assets, net | 23,467 us-gaap_FiniteLivedIntangibleAssetsNet / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember | 5,194 us-gaap_FiniteLivedIntangibleAssetsNet / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Patents, Trademarks, Trade Names and Other [Member] |  |
Finite-Lived Intangible Assets [Line Items] |  |
Intangible assets, Gross | 27,536 us-gaap_FiniteLivedIntangibleAssetsGross / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = mksi_PatentsTrademarksTradeNamesAndOtherMember | 25,636 us-gaap_FiniteLivedIntangibleAssetsGross / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = mksi_PatentsTrademarksTradeNamesAndOtherMember
Accumulated Amortization | (25,290)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = mksi_PatentsTrademarksTradeNamesAndOtherMember | (24,951)us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = mksi_PatentsTrademarksTradeNamesAndOtherMember
Foreign Currency Translation | 36 us-gaap_FiniteLivedIntangibleAssetsTranslationAdjustments / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = mksi_PatentsTrademarksTradeNamesAndOtherMember | 84 us-gaap_FiniteLivedIntangibleAssetsTranslationAdjustments / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = mksi_PatentsTrademarksTradeNamesAndOtherMember
Intangible assets, net | $ 2,282 us-gaap_FiniteLivedIntangibleAssetsNet / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = mksi_PatentsTrademarksTradeNamesAndOtherMember | $ 769 us-gaap_FiniteLivedIntangibleAssetsNet / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = mksi_PatentsTrademarksTradeNamesAndOtherMember

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- Definition Accumulated amount of amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 30 -Section 50 -Paragraph 2 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=26713463&loc=d3e16323-109275 + Details
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