XML 122 R88.htm IDEA: XBRL DOCUMENT
v2.4.1.9

Stock-Based Compensation - Additional Information (Detail) (USD $) | 12 Months Ended
--- | ---
Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Common Stock, shares issued | 53,154,666 us-gaap_CommonStockSharesIssued | 53,363,450 us-gaap_CommonStockSharesIssued |
Vesting period | 3 years |  |
Weighted average remaining contractual life of options exercisable | 10 months 6 days |  |
Closing stock price per share | $ 36.60 mksi_ClosingStockPricePerShare |  |
Number of in-the-money options exercisable | 30,224 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber |  |
Tax effect from stock-based plans | $ 331,000 us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation | $ 495,000 us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation | $ 1,862,000 us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation
Capitalization of share based payment costs | 471,000 us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsCapitalizedAmount | 471,000 us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsCapitalizedAmount |
Options granted | 0 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod | 0 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod | 0 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod
Total intrinsic value of options exercised | 958,000 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue | 684,000 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue | 1,228,000 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
Weighted average fair value per share of employee stock purchase plan rights, granted | $ 6.37 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue | $ 5.76 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue | $ 7.24 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
Total intrinsic value of options exercised and fair value of options vested | 12,106,000 us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1 | 19,221,000 us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1 | 16,498,000 us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1
RSUs Granted to Directors [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Share based compensation arrangement by share based payment award vesting period description | Earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of an acquisition. |  |
Restricted Stock Units (RSUs) [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Weighted average fair value per share of employee stock purchase plan rights, granted | $ 29.44 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue / us-gaap_AwardTypeAxis = us-gaap_RestrictedStockUnitsRSUMember |  |
Unrecognized compensation cost | 11,618,000 us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized / us-gaap_AwardTypeAxis = us-gaap_RestrictedStockUnitsRSUMember |  |
Estimated weighted average amortization period | 1 year 3 months 7 days |  |
Restricted Stock Units (RSUs) [Member] | Maximum [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Vesting period | 13 months |  |
Restricted Stock Units (RSUs) [Member] | Minimum [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Vesting period | 1 day |  |
Employee Stock Purchase Plan - Third Amended and Restated [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Shares authorized for issuance | 1,950,000 us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember |  |
Percentage of payroll deduction to compensation | Up to 10% |  |
Percentage of Common Stock through payroll deductions | 10.00%mksi_MaximumPercentageOfPayrollForPurchaseOfStock / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember |  |
Percentage of closing price of the Common Stock | 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember |  |
Common Stock, shares issued | 69,474 us-gaap_CommonStockSharesIssued / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember | 138,674 us-gaap_CommonStockSharesIssued / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember |
Employee Stock Purchase Plan - Third Amended and Restated [Member] | Offer Terminate [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Percentage of closing price of the Common Stock | 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = mksi_OfferTerminateMember |  |
Employee Stock Purchase Plan - Third Amended and Restated [Member] | Maximum [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Amount of payroll deduction | 21,250 mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountPerEmployee / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember / us-gaap_RangeAxis = us-gaap_MaximumMember |  |
Common stock, exercise price | $ 24.52 mksi_CommonStockExercisePrice / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember / us-gaap_RangeAxis = us-gaap_MaximumMember | $ 20.42 mksi_CommonStockExercisePrice / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember / us-gaap_RangeAxis = us-gaap_MaximumMember |
Employee Stock Purchase Plan - Third Amended and Restated [Member] | Minimum [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Common stock, exercise price |  | $ 23.96 mksi_CommonStockExercisePrice / us-gaap_PlanNameAxis = mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember / us-gaap_RangeAxis = us-gaap_MinimumMember |
Employee Stock Purchase Plan - Second Amended and Restated [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Shares authorized for issuance | 400,000 us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember |  |
Percentage of Common Stock through payroll deductions | 10.00%mksi_MaximumPercentageOfPayrollForPurchaseOfStock / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember |  |
Percentage of closing price of the Common Stock | 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember |  |
Common Stock, shares issued | 20,053 us-gaap_CommonStockSharesIssued / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember | 33,929 us-gaap_CommonStockSharesIssued / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember |
Employee Stock Purchase Plan - Second Amended and Restated [Member] | Offer Terminate [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Percentage of closing price of the Common Stock | 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = mksi_OfferTerminateMember |  |
Employee Stock Purchase Plan - Second Amended and Restated [Member] | Maximum [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Amount of payroll deduction | 21,250 mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountPerEmployee / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember / us-gaap_RangeAxis = us-gaap_MaximumMember |  |
Common stock, exercise price | $ 24.52 mksi_CommonStockExercisePrice / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember / us-gaap_RangeAxis = us-gaap_MaximumMember |  |
Employee Stock Purchase Plan - Second Amended and Restated [Member] | Minimum [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Common stock, exercise price | $ 20.42 mksi_CommonStockExercisePrice / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember / us-gaap_RangeAxis = us-gaap_MinimumMember | $ 23.96 mksi_CommonStockExercisePrice / us-gaap_PlanNameAxis = mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember / us-gaap_RangeAxis = us-gaap_MinimumMember |
2014 ESPP Plan [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Shares authorized for issuance | 2,500,000 us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance / us-gaap_PlanNameAxis = mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember |  |
Percentage of payroll deduction to compensation | Up to 10% |  |
Percentage of Common Stock through payroll deductions | 10.00%mksi_MaximumPercentageOfPayrollForPurchaseOfStock / us-gaap_PlanNameAxis = mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember |  |
Amount of payroll deduction | 21,250 mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountPerEmployee / us-gaap_PlanNameAxis = mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember |  |
Percentage of closing price of the Common Stock | 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice / us-gaap_PlanNameAxis = mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember |  |
Common Stock, shares issued | 82,481 us-gaap_CommonStockSharesIssued / us-gaap_PlanNameAxis = mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember |  |
Common stock, exercise price | $ 24.33 mksi_CommonStockExercisePrice / us-gaap_PlanNameAxis = mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember |  |
Shares reserved for future issuance | 2,417,519 us-gaap_CommonStockCapitalSharesReservedForFutureIssuance / us-gaap_PlanNameAxis = mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember |  |
2014 ESPP Plan [Member] | Offer Terminate [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Percentage of closing price of the Common Stock | 85.00%mksi_StockExercisePriceAsPercentageOfClosingMarketPrice / us-gaap_PlanNameAxis = mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember / us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis = mksi_OfferTerminateMember |  |
Stock Incentive Plan 2014 [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Shares reserved for future issuance | 17,876,234 us-gaap_CommonStockCapitalSharesReservedForFutureIssuance / us-gaap_PlanNameAxis = mksi_StockIncentivePlanTwoThousandFourteenMember |  |
Shares available for future grant | 18,000,000 us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant / us-gaap_PlanNameAxis = mksi_StockIncentivePlanTwoThousandFourteenMember |  |
Percentage of exercise price fair value option grant in period | 100.00%mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice / us-gaap_PlanNameAxis = mksi_StockIncentivePlanTwoThousandFourteenMember |  |
Number of shares returned for each common stock | 2.4 mksi_NumberOfSharesReturnedForEachShareOfCommonStock / us-gaap_PlanNameAxis = mksi_StockIncentivePlanTwoThousandFourteenMember |  |
Stock Incentive Plans 2001 and After [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Percentage of exercise price fair value option grant in period | 100.00%mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice / us-gaap_PlanNameAxis = mksi_StockIncentivePlan2001Member |  |
Stock options granted to employees under plans prior to 2001, vested after one year | 25.00%us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage / us-gaap_PlanNameAxis = mksi_StockIncentivePlan2001Member |  |
Stock options granted to employees under plans prior to 2001, vested per quarter thereafter | 6.25%mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPercentageMaximumPerQuarter / us-gaap_PlanNameAxis = mksi_StockIncentivePlan2001Member |  |
Stock options expired | 10 years |  |
1997 Director Plan [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Share based compensation arrangement by share based payment award vesting period description | Options granted to directors generally vested at the earliest of (1) one day prior to the next annual meeting, (2) 13 months from date of grant, or (3) the effective date of an acquisition. |  |
1997 Director Plan [Member] | Maximum [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Vesting period | 13 months |  |
1997 Director Plan [Member] | Minimum [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Vesting period | 1 day |  |
Restricted Stock Units (RSUs) [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Stock options granted to employees under plans prior to 2001, vested after one year | 33.30%us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage / us-gaap_PlanNameAxis = us-gaap_RestrictedStockUnitsRSUMember | 33.30%us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage / us-gaap_PlanNameAxis = us-gaap_RestrictedStockUnitsRSUMember |
Stock options expired | 3 years |  |
RSUs Granted to Employees [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Share based compensation arrangement by share based payment award vesting period description | Employees who are at least 60 years old and have a combined years of age plus Years of Service (as defined in the applicable RSU agreement) equal to 70 years or more are expensed immediately. |  |
Employee Stock Option [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Cash received from employees as a result of employee stock option exercises | 1,605,000 us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions / us-gaap_OptionIndexedToIssuersEquityTypeAxis = us-gaap_EmployeeStockOptionMember | 1,869,000 us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions / us-gaap_OptionIndexedToIssuersEquityTypeAxis = us-gaap_EmployeeStockOptionMember |
Tax effect from stock-based plans | $ 175,000 us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation / us-gaap_OptionIndexedToIssuersEquityTypeAxis = us-gaap_EmployeeStockOptionMember | $ 94,000 us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation / us-gaap_OptionIndexedToIssuersEquityTypeAxis = us-gaap_EmployeeStockOptionMember |

X
- Definition Closing stock price per share. + References No definition available. + Details
Name: | mksi_ClosingStockPricePerShare
Namespace Prefix: | mksi_
Data Type: | num:perShareItemType
Balance Type: | na
Period Type: | instant

X
- Definition Common stock exercise price. + References No definition available. + Details
Name: | mksi_CommonStockExercisePrice
Namespace Prefix: | mksi_
Data Type: | num:perShareItemType
Balance Type: | na
Period Type: | duration

X
- Definition Maximum percentage of payroll for purchase of stock. + References No definition available. + Details
Name: | mksi_MaximumPercentageOfPayrollForPurchaseOfStock
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Number Of Shares Returned For Each Share Of Common Stock + References No definition available. + Details
Name: | mksi_NumberOfSharesReturnedForEachShareOfCommonStock
Namespace Prefix: | mksi_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Percentage of payroll deduction to compensation. + References No definition available. + Details
Name: | mksi_PercentageOfPayrollDeductionToCompensation
Namespace Prefix: | mksi_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share based compensation arrangement by share based payment award maximum amount per employee. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardMaximumAmountPerEmployee
Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Percentage of the balance sheet date at which grantees can acquire the shares reserved for issuance on stock options awarded under the plan during the reporting period. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share based compensation arrangement by share based payment award vesting percentage maximum per quarter. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPercentageMaximumPerQuarter
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Share based compensation arrangement by share based payment award vesting period description. + References No definition available. + Details
Name: | mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription
Namespace Prefix: | mksi_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Stock exercise price as percentage of closing market price. + References No definition available. + Details
Name: | mksi_StockExercisePriceAsPercentageOfClosingMarketPrice
Namespace Prefix: | mksi_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of increase in additional paid in capital (APIC) resulting from a tax benefit associated with share-based compensation plan other than an employee stock ownership plan (ESOP). Includes, but is not limited to, excess tax benefit. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 505 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6928386&loc=d3e21463-112644 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 505 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.3-04) -URI http://asc.fasb.org/extlink&oid=27012166&loc=d3e187085-122770 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 740 -Section 45 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6419406&loc=d3e23524-113945 + Details
Name: | us-gaap_AdjustmentsToAdditionalPaidInCapitalTaxEffectFromShareBasedCompensation
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Aggregate number of common shares reserved for future issuance. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.29) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 + Details
Name: | us-gaap_CommonStockCapitalSharesReservedForFutureIssuance
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 210 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SX 210.5-02.29) -URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Regulation S-X (SX) -Number 210 -Section 02 -Paragraph 30 -Article 5 + Details
Name: | us-gaap_CommonStockSharesIssued
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition The maximum number of shares authorized for issuance under the deferred compensation arrangement as of the balance sheet date. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(3) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Represents the compensation cost capitalized during the period arising from equity-based compensation arrangements (for example, shares of stock, units, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1)(ii) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsCapitalizedAmount
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Aggregate proceeds received by the entity during the annual period from exercises of stock or unit options and conversion of similar instruments granted under equity-based payment arrangements. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (j) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_EmployeeServiceShareBasedCompensationCashReceivedFromExerciseOfStockOptions
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Unrecognized cost of unvested share-based compensation awards. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (i) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Definition Weighted average period over which unrecognized compensation is expected to be recognized for equity-based compensation plans, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (i) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition Period which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition Percentage of vesting of share-based compensation awards. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage
Namespace Prefix: | us-gaap_
Data Type: | num:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan). + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(2)(iii)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
Namespace Prefix: | us-gaap_
Data Type: | num:perShareItemType
Balance Type: | na
Period Type: | duration

X
- Definition Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (a)(2) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod
Namespace Prefix: | us-gaap_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1)(iii) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | instant

X
- Definition Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (d)(2) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Net number of share options (or share units) granted during the period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c)(1)(iv)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriod
Namespace Prefix: | us-gaap_
Data Type: | xbrli:sharesItemType
Balance Type: | na
Period Type: | duration

X
- Definition Fair value of options vested. Excludes equity instruments other than options, for example, but not limited to, share units, stock appreciation rights, restricted stock. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (c) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Weighted average remaining contractual term of outstanding stock options, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (e)(1) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
Name: | us-gaap_SharebasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeOutstandingOptionsWeightedAverageRemainingContractualTerm2
Namespace Prefix: | us-gaap_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Details
Name: | us-gaap_AwardTypeAxis=mksi_RestrictedStockUnitsGrantedToDirectorsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_OptionIndexedToIssuersEquityTypeAxis=us-gaap_EmployeeStockOptionMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_NineteenNinetySevenDirectorPlanMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_RestrictedStockUnitsGrantedToEmployeesMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_SecondAmendedAndRestatedInternationalEmployeeStockPurchasePlanMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_StockIncentivePlan2001Member
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_StockIncentivePlanTwoThousandFourteenMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_ThirdAmendedAndRestatedNineteenNinetyNineEmployeeStockPurchasePlanMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_PlanNameAxis=us-gaap_RestrictedStockUnitsRSUMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |