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Stock-Based Compensation - Effect of Recording Stock-Based Compensation (Detail) (USD $) In Thousands, except Per Share data, unless otherwise specified | 12 Months Ended
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Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Total stock-based compensation | $ 11,315 us-gaap_AllocatedShareBasedCompensationExpense | $ 13,992 us-gaap_AllocatedShareBasedCompensationExpense | $ 13,031 us-gaap_AllocatedShareBasedCompensationExpense
Tax effect on stock-based compensation | (331)us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense | (495)us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense | (1,862)us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense
Net effect on net income | 10,984 us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax | 13,497 us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax | 11,169 us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax
Basic | $ 0.21 mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic | $ 0.25 mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic | $ 0.21 mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic
Diluted | $ 0.21 mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted | $ 0.25 mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted | $ 0.21 mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted
Restricted Stock Units (RSUs) [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Total stock-based compensation | 10,203 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_AwardTypeAxis = us-gaap_RestrictedStockUnitsRSUMember | 12,982 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_AwardTypeAxis = us-gaap_RestrictedStockUnitsRSUMember | 11,836 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_AwardTypeAxis = us-gaap_RestrictedStockUnitsRSUMember
Employee Stock Purchase Plan [Member] |  |  |
Share-based Compensation Arrangement by Share-based Payment Award [Line Items] |  |  |
Total stock-based compensation | $ 1,112 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_AwardTypeAxis = mksi_EmployeeStockPurchasePlanMember | $ 1,010 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_AwardTypeAxis = mksi_EmployeeStockPurchasePlanMember | $ 1,195 us-gaap_AllocatedShareBasedCompensationExpense / us-gaap_AwardTypeAxis = mksi_EmployeeStockPurchasePlanMember

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- Definition Allocated share based compensation effect on earning per share basic. + References No definition available. + Details
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- Definition Allocated share based compensation effect on earning per share diluted. + References No definition available. + Details
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- Definition Represents the expense recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5047-113901 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section S99 -Paragraph 1 -Subparagraph (SAB TOPIC 14.F) -URI http://asc.fasb.org/extlink&oid=27013229&loc=d3e301413-122809 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1)(i) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 Reference 4: http://www.xbrl.org/2003/role/presentationRef -Publisher SEC -Name Staff Accounting Bulletin (SAB) -Number Topic 14 -Section F + Details
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- Definition The amount of expense, net of income tax, recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees. + References No definition available. + Details
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- Definition The total recognized tax benefit related to compensation cost for equity-based payment arrangements recognized in income during the period. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 718 -SubTopic 10 -Section 50 -Paragraph 2 -Subparagraph (h)(1)(i) -URI http://asc.fasb.org/extlink&oid=6415400&loc=d3e5070-113901 + Details
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