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Goodwill and Intangible Assets - Intangible Assets (Parenthetical) (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended | 0 Months Ended | 1 Months Ended | 0 Months Ended
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Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012 | Mar. 12, 2013 | Jun. 30, 2013 | May 30, 2014
Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquisition purchase price | $ 86,950 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired | $ 2,326 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired | $ 22,607 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired |  |  |
Alter S.r.l [Member] |  |  |  |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets |  | 268 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  | 2,806 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |
Acquisition purchase price |  |  |  | 2,426 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember | 2,058 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |
Alter S.r.l [Member] | Completed Technology [Member] |  |  |  |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets |  | 388 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember |  | 2,208 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember |  |
Alter S.r.l [Member] | Trademark and Trade Names [Member] |  |  |  |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets |  |  |  | 598 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember |  |
Granville-Phillips [Member] |  |  |  |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets | 38,850 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember |  |  |  |  | 38,850 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Granville-Phillips [Member] | Completed Technology [Member] |  |  |  |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets | 15,700 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_PatentedTechnologyMember |  |  |  |  |
Granville-Phillips [Member] | Customer Relationships [Member] |  |  |  |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets | 21,250 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember |  |  |  |  | 21,250 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_CustomerRelationshipsMember
Granville-Phillips [Member] | Trademark and Trade Names [Member] |  |  |  |  |  |
Finite-Lived Intangible Assets [Line Items] |  |  |  |  |  |
Acquired intangible assets | $ 1,900 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember |  |  |  |  | $ 1,900 us-gaap_FinitelivedIntangibleAssetsAcquired1 / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember / us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis = us-gaap_TrademarksAndTradeNamesMember

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- Definition Amount of increase in assets, excluding financial assets, lacking physical substance with a definite life, resulting from a business combination. + References No definition available. + Details
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- Definition The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Glossary Investing Activities -URI http://asc.fasb.org/extlink&oid=6516133 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 13 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585 + Details
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