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Acquisitions - Additional Information (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended | 0 Months Ended | 1 Months Ended | 0 Months Ended | 3 Months Ended | 0 Months Ended
--- | --- | --- | --- | --- | --- | ---
Dec. 31, 2014 | Dec. 31, 2013 | Dec. 31, 2012 | Mar. 12, 2013 | Jun. 30, 2013 | Aug. 29, 2012 | Dec. 31, 2012 | May 30, 2014
Business Acquisition [Line Items] |  |  |  |  |  |  |  |
Total cash paid, net of cash acquired | $ 86,950 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired | $ 2,326 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired | $ 22,607 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired |  |  |  |  |
Alter S.r.l [Member] |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |
Business combination consideration price |  |  |  | 2,447 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Acquisition purchase price, net of cash acquired |  |  |  | 2,426 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |
Acquisition date | Mar. 12, 2013 |  |  |  |  |  |  |
Total cash paid, net of cash acquired |  |  |  | 2,426 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember | 2,058 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |
Cash acquired from acquisition | 21 us-gaap_CashAcquiredFromAcquisition / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |  |  |  |
Remaining cash to be paid | 368 mksi_BusinessCombinationAssetPurchaseContingentConsiderationMaximumPotentialCashPayment / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |  |  |  |
Holdback provisions paid | 123 mksi_PaymentsUnderBusinessCombinationForHoldbackProvisions / us-gaap_BusinessAcquisitionAxis = mksi_AlterMember |  |  |  |  |  |  |
Plasmart, Inc. [Member] |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |
Business combination consideration price |  |  |  |  |  | 22,700 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Acquisition purchase price, net of cash acquired |  |  |  |  |  | 22,607 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Acquisition date | Aug. 29, 2012 |  |  |  |  |  |  |
Total cash paid, net of cash acquired |  |  |  |  |  | 22,607 us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Acquisition related costs |  |  |  |  |  | 1,258 us-gaap_BusinessAcquisitionCostOfAcquiredEntityTransactionCosts / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Working capital adjustments |  |  |  |  |  |  | 1,778 mksi_BusinessCombinationWorkingCapitalAdjustment / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |
Step-up inventory |  |  |  |  |  | 303 us-gaap_InventoryAdjustments / us-gaap_BusinessAcquisitionAxis = mksi_PlasmartIncMember |  |
Granville-Phillips [Member] |  |  |  |  |  |  |  |
Business Acquisition [Line Items] |  |  |  |  |  |  |  |
Business combination consideration price, cash |  |  |  |  |  |  |  | 86,950 us-gaap_PaymentsToAcquireBusinessesGross / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Business combination contingent consideration |  |  |  |  |  |  |  | 50 us-gaap_BusinessCombinationContingentConsiderationLiability / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember
Business combination consideration price |  |  |  |  |  |  |  | $ 87,000 us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredGoodwillAndLiabilitiesAssumedNet / us-gaap_BusinessAcquisitionAxis = mksi_GranvillePhillipsMember

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