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Goodwill and Intangible Assets - Goodwill (Detail) (USD $) In Thousands, unless otherwise specified | 12 Months Ended
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Dec. 31, 2014 | Dec. 31, 2013
Goodwill and Intangible Assets Disclosure [Abstract] |  |
Beginning balance, Goodwill Gross Carrying Amount | $ 290,323 us-gaap_GoodwillGross | $ 290,147 us-gaap_GoodwillGross
Acquired goodwill, Gross Carrying Amount | 41,993 us-gaap_GoodwillAcquiredDuringPeriod |
Foreign currency translation, Gross Carrying Amount | (521)mksi_GoodwillTranslationAdjustmentsGross | 176 mksi_GoodwillTranslationAdjustmentsGross
Ending balance, Goodwill Gross Carrying Amount | 331,795 us-gaap_GoodwillGross | 290,323 us-gaap_GoodwillGross
Beginning balance, Accumulated Impairment (Loss) | (139,414)us-gaap_GoodwillImpairedAccumulatedImpairmentLoss | (139,414)us-gaap_GoodwillImpairedAccumulatedImpairmentLoss
Acquired goodwill, Accumulated Impairment (Loss) | 0 mksi_GoodwillAcquiredImpairmentLoss | 0 mksi_GoodwillAcquiredImpairmentLoss
Foreign currency translation, Accumulated Impairment (Loss) | 0 us-gaap_GoodwillTranslationAdjustments | 0 us-gaap_GoodwillTranslationAdjustments
Ending balance, Accumulated Impairment (Loss) | (139,414)us-gaap_GoodwillImpairedAccumulatedImpairmentLoss | (139,414)us-gaap_GoodwillImpairedAccumulatedImpairmentLoss
Beginning balance, Goodwill Net | 150,909 us-gaap_Goodwill | 150,733 us-gaap_Goodwill
Acquired goodwill, Net | 41,993 mksi_GoodwillAcquiredDuringPeriodNet |
Foreign currency translation, Net | (521)mksi_GoodwillTranslationAdjustmentsNet | 176 mksi_GoodwillTranslationAdjustmentsNet
Ending balance, Goodwill Net | $ 192,381 us-gaap_Goodwill | $ 150,909 us-gaap_Goodwill

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- Definition Goodwill acquired during period net. + References No definition available. + Details
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Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition Goodwill acquired impairment loss. + References No definition available. + Details
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Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition Goodwill translation adjustments gross. + References No definition available. + Details
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Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition Goodwill translation adjustments, net. + References No definition available. + Details
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Namespace Prefix: | mksi_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

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- Definition Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 50 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267 Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 45 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=6388280&loc=d3e13770-109266 + Details
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Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

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- Definition Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267 + Details
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- Details
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- Definition Amount before accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (a,h) -URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267 + Details
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- Definition Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (a,h) -URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267 + Details
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- Definition Amount of increase (decrease) from foreign currency translation adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 50 -Paragraph 1 -Subparagraph (f) -URI http://asc.fasb.org/extlink&oid=35741047&loc=d3e13816-109267 + Details
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