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Business Segment, Geographic Area, Product and Significant Customer Information - Reconciliation of Segment Gross Profit to Consolidated Net Income (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended								12 Months Ended
	Dec. 31, 2014	Sep. 30, 2014	Jun. 30, 2014	Mar. 31, 2014	Dec. 31, 2013	Sep. 30, 2013	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2014	Dec. 31, 2013	Dec. 31, 2012
Segment Reporting Information [Line Items]
Gross profit	$ 89,434us-gaap_GrossProfit	$ 79,325us-gaap_GrossProfit	$ 79,635us-gaap_GrossProfit	$ 89,372us-gaap_GrossProfit	$ 87,680us-gaap_GrossProfit	$ 62,234us-gaap_GrossProfit	$ 61,958us-gaap_GrossProfit	$ 54,702us-gaap_GrossProfit	$ 337,766us-gaap_GrossProfit	$ 266,574us-gaap_GrossProfit	$ 269,479us-gaap_GrossProfit
Research and development									62,888us-gaap_ResearchAndDevelopmentExpense	63,570us-gaap_ResearchAndDevelopmentExpense	60,118us-gaap_ResearchAndDevelopmentExpense
Selling, general and administrative									131,828us-gaap_SellingGeneralAndAdministrativeExpense	142,014us-gaap_SellingGeneralAndAdministrativeExpense	127,185us-gaap_SellingGeneralAndAdministrativeExpense
Litigation											5,316us-gaap_LitigationSettlementExpense
Insurance reimbursement										(1,071)us-gaap_InsuranceRecoveries
Acquisition costs									499us-gaap_BusinessCombinationAcquisitionRelatedCosts	171us-gaap_BusinessCombinationAcquisitionRelatedCosts	1,258us-gaap_BusinessCombinationAcquisitionRelatedCosts
Restructuring									2,464us-gaap_RestructuringCharges	1,364us-gaap_RestructuringCharges	343us-gaap_RestructuringCharges
Amortization of intangible assets									4,945us-gaap_AmortizationOfIntangibleAssets	2,139us-gaap_AmortizationOfIntangibleAssets	1,036us-gaap_AmortizationOfIntangibleAssets
Income from operations	38,554us-gaap_OperatingIncomeLoss	28,150us-gaap_OperatingIncomeLoss	30,660us-gaap_OperatingIncomeLoss	37,778us-gaap_OperatingIncomeLoss	30,952us-gaap_OperatingIncomeLoss	12,332us-gaap_OperatingIncomeLoss	10,427us-gaap_OperatingIncomeLoss	4,676us-gaap_OperatingIncomeLoss	135,142us-gaap_OperatingIncomeLoss	58,387us-gaap_OperatingIncomeLoss	74,223us-gaap_OperatingIncomeLoss
Net interest income									1,323us-gaap_InterestAndOtherIncome	999us-gaap_InterestAndOtherIncome	1,059us-gaap_InterestAndOtherIncome
Income before income taxes									136,393us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments	59,301us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments	75,136us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments
Provision for income taxes									20,615us-gaap_IncomeTaxExpenseBenefit	23,525us-gaap_IncomeTaxExpenseBenefit	27,107us-gaap_IncomeTaxExpenseBenefit
Net income	34,192us-gaap_NetIncomeLoss	29,117us-gaap_NetIncomeLoss	21,224us-gaap_NetIncomeLoss	31,245us-gaap_NetIncomeLoss	20,237us-gaap_NetIncomeLoss	2,458us-gaap_NetIncomeLoss	7,320us-gaap_NetIncomeLoss	5,761us-gaap_NetIncomeLoss	115,778us-gaap_NetIncomeLoss	35,776us-gaap_NetIncomeLoss	48,029us-gaap_NetIncomeLoss
Operating Segments [Member] | Advanced Manufacturing Capital Equipment [Member]
Segment Reporting Information [Line Items]
Gross profit									260,669us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember	187,685us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember	171,308us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AdvanceManufacturingCapitalEquipmentMember
Operating Segments [Member] | Analytical Solutions Group [Member]
Segment Reporting Information [Line Items]
Gross profit									30,787us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember	29,431us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember	32,741us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AnalyticalSolutionsGroupMember
Operating Segments [Member] | Europe Region Sales & Service [Member]
Segment Reporting Information [Line Items]
Gross profit									15,467us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember	13,600us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember	15,156us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_EuropeSalesAndServiceOperationsMember
Operating Segments [Member] | Asia Region Sales & Service Operations [Member]
Segment Reporting Information [Line Items]
Gross profit									40,717us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember	42,948us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember	36,962us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = us-gaap_OperatingSegmentsMember / us-gaap_StatementBusinessSegmentsAxis = mksi_AsiaSalesAndServiceOperationsMember
Corporate, Eliminations and Other [Member]
Segment Reporting Information [Line Items]
Gross profit									$ (9,874)us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember	$ (7,090)us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember	$ 13,312us-gaap_GrossProfit / us-gaap_ConsolidationItemsAxis = mksi_CorporateEliminationsAndOtherMember

X

- Definition

The aggregate expense charged against earnings to allocate the cost of intangible assets (nonphysical assets not used in production) in a systematic and rational manner to the periods expected to benefit from such assets. As a noncash expense, this element is added back to net income when calculating cash provided by or used in operations using the indirect method.

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Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.

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Sum of operating profit and nonoperating income or expense before Income or Loss from equity method investments, income taxes, extraordinary items, and noncontrolling interest.

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Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.

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The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.

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Amount of expenses associated with exit or disposal activities pursuant to an authorized plan. Excludes expenses related to a discontinued operation or an asset retirement obligation.

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