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Business Segment, Geographic Area, Product and Significant Customer Information - Reconciliation of Segment Assets to Consolidated Total Assets (Detail) (USD $)
In Thousands, unless otherwise specified
Dec. 31, 2014
Dec. 31, 2013
Segment Reporting Information [Line Items]    
Total assets $ 1,224,044us-gaap_Assets $ 1,213,018us-gaap_Assets
Other current assets 27,512us-gaap_OtherAssetsCurrent 16,715us-gaap_OtherAssetsCurrent
Property, plant and equipment, net 72,776us-gaap_PropertyPlantAndEquipmentNet 77,536us-gaap_PropertyPlantAndEquipmentNet
Other assets 17,206us-gaap_OtherAssetsNoncurrent 31,847us-gaap_OtherAssetsNoncurrent
Reconciliation of Segment Assets to Consolidated Assets [Member]    
Segment Reporting Information [Line Items]    
Total assets 261,531us-gaap_Assets
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
259,471us-gaap_Assets
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Cash and cash equivalents and investments 592,232us-gaap_InvestmentsAndCash
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
650,022us-gaap_InvestmentsAndCash
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Other current assets 41,529us-gaap_OtherAssetsCurrent
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
30,143us-gaap_OtherAssetsCurrent
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Property, plant and equipment, net 72,776us-gaap_PropertyPlantAndEquipmentNet
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
77,536us-gaap_PropertyPlantAndEquipmentNet
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Goodwill and intangible assets, net 238,770us-gaap_IntangibleAssetsNetIncludingGoodwill
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
163,999us-gaap_IntangibleAssetsNetIncludingGoodwill
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
Other assets $ 17,206us-gaap_OtherAssetsNoncurrent
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember
$ 31,847us-gaap_OtherAssetsNoncurrent
/ us-gaap_StatementBusinessSegmentsAxis
= mksi_ReconciliationsOfSegmentAssetsToConsolidatedAssetsMember